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• W2072400972 abstract "We present the design, fabrication, and characterization of a self-sensing nanopipette (SSN) that can dispense liquids and perform scanning probe nanolithography. The device consists of a legged hollow SiO2 microfluidic cantilever connected to an on-chip fluid reservoir. The cantilever has a Si3N4 tip with a nozzle for fluid dispensing. The self-sensing capability is given by integrating gold piezoresistors on the legs, where the maximum strain is concentrated. The SSN has a resonance frequency of 122.185 kHz and a stiffness of 4.77 N/m, which are in agreement with the analytical and simulated values. The piezoresistors experienced a change in resistance of 0.35Ω for a cantilever deflection of 18.8 μm, leading to a gauge factor of 0.3. The dispensed liquid has an estimated volume in the range of tens of zeptolitres." @default.
• W2072400972 created "2016-06-24" @default.
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• W2072400972 date "2013-06-01" @default.
• W2072400972 modified "2023-10-16" @default.
• W2072400972 title "Self-sensing nanopipette for liquid dispensing and AFM imaging" @default.
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• W2072400972 doi "https://doi.org/10.1109/transducers.2013.6627350" @default.
• W2072400972 hasPublicationYear "2013" @default.
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