FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2072402120> ?p ?o ?g. }

• W2072402120 endingPage "11RB01" @default.
• W2072402120 startingPage "11RB01" @default.
• W2072402120 abstract "The thermal diffusivities of AlN thin films with a thickness of about 600 nm deposited by reactive rf magnetron sputtering were measured by the pulsed light heating thermoreflectance technique. The AlN films contain oxygen impurities ranging from 1.1 to 13.6 at. % depending on the sputtering conditions. The measured thermal diffusivity increases from 1.5×10 -6 to 12×10 -6 m 2 s -1 with the decrease in oxygen concentration. An X-ray diffraction study shows that the AlN lattice parameter of the c -axis decreases with the increase in oxygen concentration. The average crystal diameter of the AlN films derived from the X-ray diffraction peaks is 41 nm. The dependence of the thermal conductivity of the AlN films on the oxygen concentration was discussed on the basis of the thermal resistance induced by oxygen impurities and phonon scattering by grain boundaries." @default.
• W2072402120 created "2016-06-24" @default.
• W2072402120 creator A5021449507 @default.
• W2072402120 creator A5038646221 @default.
• W2072402120 creator A5041127983 @default.
• W2072402120 creator A5052984027 @default.
• W2072402120 creator A5063715165 @default.
• W2072402120 creator A5086178302 @default.
• W2072402120 date "2011-11-01" @default.
• W2072402120 modified "2023-10-16" @default.
• W2072402120 title "Effect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering" @default.
• W2072402120 cites W1965904439 @default.
• W2072402120 cites W1968314696 @default.
• W2072402120 cites W1981808024 @default.
• W2072402120 cites W1983782599 @default.
• W2072402120 cites W1995952816 @default.
• W2072402120 cites W2000750884 @default.
• W2072402120 cites W2001105193 @default.
• W2072402120 cites W2002501755 @default.
• W2072402120 cites W2003327876 @default.
• W2072402120 cites W2004588519 @default.
• W2072402120 cites W2008361449 @default.
• W2072402120 cites W2011691884 @default.
• W2072402120 cites W2014256107 @default.
• W2072402120 cites W2021595114 @default.
• W2072402120 cites W2039913071 @default.
• W2072402120 cites W2042230937 @default.
• W2072402120 cites W2045112945 @default.
• W2072402120 cites W2054273790 @default.
• W2072402120 cites W2062970180 @default.
• W2072402120 cites W2065252673 @default.
• W2072402120 cites W2067637314 @default.
• W2072402120 cites W2067643095 @default.
• W2072402120 cites W2068375863 @default.
• W2072402120 cites W2071548685 @default.
• W2072402120 cites W2126781570 @default.
• W2072402120 cites W2127076004 @default.
• W2072402120 cites W2137560559 @default.
• W2072402120 cites W2329545299 @default.
• W2072402120 cites W301371110 @default.
• W2072402120 doi "https://doi.org/10.1143/jjap.50.11rb01" @default.
• W2072402120 hasPublicationYear "2011" @default.
• W2072402120 type Work @default.
• W2072402120 sameAs 2072402120 @default.
• W2072402120 citedByCount "6" @default.
• W2072402120 countsByYear W20724021202012 @default.
• W2072402120 countsByYear W20724021202013 @default.
• W2072402120 countsByYear W20724021202014 @default.
• W2072402120 countsByYear W20724021202018 @default.
• W2072402120 countsByYear W20724021202023 @default.
• W2072402120 crossrefType "journal-article" @default.
• W2072402120 hasAuthorship W2072402120A5021449507 @default.
• W2072402120 hasAuthorship W2072402120A5038646221 @default.
• W2072402120 hasAuthorship W2072402120A5041127983 @default.
• W2072402120 hasAuthorship W2072402120A5052984027 @default.
• W2072402120 hasAuthorship W2072402120A5063715165 @default.
• W2072402120 hasAuthorship W2072402120A5086178302 @default.
• W2072402120 hasConcept C113196181 @default.
• W2072402120 hasConcept C120665830 @default.
• W2072402120 hasConcept C121332964 @default.
• W2072402120 hasConcept C132612359 @default.
• W2072402120 hasConcept C171250308 @default.
• W2072402120 hasConcept C178790620 @default.
• W2072402120 hasConcept C185592680 @default.
• W2072402120 hasConcept C19067145 @default.
• W2072402120 hasConcept C192562407 @default.
• W2072402120 hasConcept C207114421 @default.
• W2072402120 hasConcept C22423302 @default.
• W2072402120 hasConcept C37668627 @default.
• W2072402120 hasConcept C43617362 @default.
• W2072402120 hasConcept C540031477 @default.
• W2072402120 hasConcept C61427134 @default.
• W2072402120 hasConcept C62520636 @default.
• W2072402120 hasConcept C71987851 @default.
• W2072402120 hasConceptScore W2072402120C113196181 @default.
• W2072402120 hasConceptScore W2072402120C120665830 @default.
• W2072402120 hasConceptScore W2072402120C121332964 @default.
• W2072402120 hasConceptScore W2072402120C132612359 @default.
• W2072402120 hasConceptScore W2072402120C171250308 @default.
• W2072402120 hasConceptScore W2072402120C178790620 @default.
• W2072402120 hasConceptScore W2072402120C185592680 @default.
• W2072402120 hasConceptScore W2072402120C19067145 @default.
• W2072402120 hasConceptScore W2072402120C192562407 @default.
• W2072402120 hasConceptScore W2072402120C207114421 @default.
• W2072402120 hasConceptScore W2072402120C22423302 @default.
• W2072402120 hasConceptScore W2072402120C37668627 @default.
• W2072402120 hasConceptScore W2072402120C43617362 @default.
• W2072402120 hasConceptScore W2072402120C540031477 @default.
• W2072402120 hasConceptScore W2072402120C61427134 @default.
• W2072402120 hasConceptScore W2072402120C62520636 @default.
• W2072402120 hasConceptScore W2072402120C71987851 @default.
• W2072402120 hasIssue "11S" @default.
• W2072402120 hasLocation W20724021201 @default.
• W2072402120 hasOpenAccess W2072402120 @default.
• W2072402120 hasPrimaryLocation W20724021201 @default.
• W2072402120 hasRelatedWork W1968373997 @default.
• W2072402120 hasRelatedWork W1987320405 @default.
• W2072402120 hasRelatedWork W2000590895 @default.

• next