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- W2072467321 abstract "Polycrystalline silicon thin films (about 800 Å thick) on silicon dioxide, annealed in ammonia at 1160 °C for various times, have been analyzed using Auger electron spectroscopy in combination with argon ion sputtering and Rutherford backscattering spectrometry. Nitridation results in the growth of surface nitride layers of the same thickness as on monocrystalline silicon. However, nitridation times longer than 30 min give rise to an additional (oxy)nitride formation at the polysilicon/silicon dioxide interface. The degree of coverage of the grain boundary surface by nitrogen is estimated to be well below monolayer level." @default.
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- W2072467321 date "1983-06-01" @default.
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- W2072467321 title "Surface and interface nitridation of thin polycrystalline silicon films" @default.
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- W2072467321 doi "https://doi.org/10.1063/1.93810" @default.
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