Matches in SemOpenAlex for { <https://semopenalex.org/work/W2072588049> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2072588049 abstract "Anisotropic etching for microelectronics fabrication is accomplished by energetic ion bombardment in chemically enhanced sputtering. One challenge is being able to control the ion energy-angular distributions (IEADs) onto the surface of the wafer to selectively activate desired processes, which is advantageous for maintaining the critical dimension (CD) of features. Capacitive coupled plasmas (CCPs) powered by non-sinusoidal waveforms and or using multiple frequencies are strategies employed to provide flexible control of IEADs which produce high selectivity and uniformity. Varying relative voltages, powers and phases between multiple frequencies that differ by integer multiples have demonstrated potential control mechanisms for the IEADs and optimization of etching profiles." @default.
- W2072588049 created "2016-06-24" @default.
- W2072588049 creator A5009306289 @default.
- W2072588049 creator A5075319938 @default.
- W2072588049 creator A5087233786 @default.
- W2072588049 date "2014-05-01" @default.
- W2072588049 modified "2023-09-24" @default.
- W2072588049 title "Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas" @default.
- W2072588049 cites W2112552636 @default.
- W2072588049 doi "https://doi.org/10.1109/plasma.2014.7012146" @default.
- W2072588049 hasPublicationYear "2014" @default.
- W2072588049 type Work @default.
- W2072588049 sameAs 2072588049 @default.
- W2072588049 citedByCount "0" @default.
- W2072588049 crossrefType "proceedings-article" @default.
- W2072588049 hasAuthorship W2072588049A5009306289 @default.
- W2072588049 hasAuthorship W2072588049A5075319938 @default.
- W2072588049 hasAuthorship W2072588049A5087233786 @default.
- W2072588049 hasConcept C100460472 @default.
- W2072588049 hasConcept C107187091 @default.
- W2072588049 hasConcept C119599485 @default.
- W2072588049 hasConcept C121332964 @default.
- W2072588049 hasConcept C127413603 @default.
- W2072588049 hasConcept C130472188 @default.
- W2072588049 hasConcept C145148216 @default.
- W2072588049 hasConcept C160671074 @default.
- W2072588049 hasConcept C165801399 @default.
- W2072588049 hasConcept C171250308 @default.
- W2072588049 hasConcept C178790620 @default.
- W2072588049 hasConcept C185592680 @default.
- W2072588049 hasConcept C187937830 @default.
- W2072588049 hasConcept C19067145 @default.
- W2072588049 hasConcept C192562407 @default.
- W2072588049 hasConcept C197424946 @default.
- W2072588049 hasConcept C206755178 @default.
- W2072588049 hasConcept C22423302 @default.
- W2072588049 hasConcept C2779227376 @default.
- W2072588049 hasConcept C44280652 @default.
- W2072588049 hasConcept C49040817 @default.
- W2072588049 hasConcept C62520636 @default.
- W2072588049 hasConcept C68687820 @default.
- W2072588049 hasConcept C82706917 @default.
- W2072588049 hasConcept C95974651 @default.
- W2072588049 hasConceptScore W2072588049C100460472 @default.
- W2072588049 hasConceptScore W2072588049C107187091 @default.
- W2072588049 hasConceptScore W2072588049C119599485 @default.
- W2072588049 hasConceptScore W2072588049C121332964 @default.
- W2072588049 hasConceptScore W2072588049C127413603 @default.
- W2072588049 hasConceptScore W2072588049C130472188 @default.
- W2072588049 hasConceptScore W2072588049C145148216 @default.
- W2072588049 hasConceptScore W2072588049C160671074 @default.
- W2072588049 hasConceptScore W2072588049C165801399 @default.
- W2072588049 hasConceptScore W2072588049C171250308 @default.
- W2072588049 hasConceptScore W2072588049C178790620 @default.
- W2072588049 hasConceptScore W2072588049C185592680 @default.
- W2072588049 hasConceptScore W2072588049C187937830 @default.
- W2072588049 hasConceptScore W2072588049C19067145 @default.
- W2072588049 hasConceptScore W2072588049C192562407 @default.
- W2072588049 hasConceptScore W2072588049C197424946 @default.
- W2072588049 hasConceptScore W2072588049C206755178 @default.
- W2072588049 hasConceptScore W2072588049C22423302 @default.
- W2072588049 hasConceptScore W2072588049C2779227376 @default.
- W2072588049 hasConceptScore W2072588049C44280652 @default.
- W2072588049 hasConceptScore W2072588049C49040817 @default.
- W2072588049 hasConceptScore W2072588049C62520636 @default.
- W2072588049 hasConceptScore W2072588049C68687820 @default.
- W2072588049 hasConceptScore W2072588049C82706917 @default.
- W2072588049 hasConceptScore W2072588049C95974651 @default.
- W2072588049 hasLocation W20725880491 @default.
- W2072588049 hasOpenAccess W2072588049 @default.
- W2072588049 hasPrimaryLocation W20725880491 @default.
- W2072588049 hasRelatedWork W1493857624 @default.
- W2072588049 hasRelatedWork W1624189602 @default.
- W2072588049 hasRelatedWork W1898816625 @default.
- W2072588049 hasRelatedWork W1965436071 @default.
- W2072588049 hasRelatedWork W1973305293 @default.
- W2072588049 hasRelatedWork W2007185414 @default.
- W2072588049 hasRelatedWork W2026000982 @default.
- W2072588049 hasRelatedWork W2076039583 @default.
- W2072588049 hasRelatedWork W2095271924 @default.
- W2072588049 hasRelatedWork W2101144934 @default.
- W2072588049 hasRelatedWork W2127773269 @default.
- W2072588049 hasRelatedWork W2163140797 @default.
- W2072588049 hasRelatedWork W2167057518 @default.
- W2072588049 hasRelatedWork W2210985800 @default.
- W2072588049 hasRelatedWork W2512524790 @default.
- W2072588049 hasRelatedWork W2516559155 @default.
- W2072588049 hasRelatedWork W2795601902 @default.
- W2072588049 hasRelatedWork W3096259871 @default.
- W2072588049 hasRelatedWork W613445607 @default.
- W2072588049 hasRelatedWork W2150874624 @default.
- W2072588049 isParatext "false" @default.
- W2072588049 isRetracted "false" @default.
- W2072588049 magId "2072588049" @default.
- W2072588049 workType "article" @default.