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- W2072697647 abstract "Phase selective chromium oxide films are deposited from chromyl chloride by CVD in the temperature range 320–380 °C. Phase selectivity is found to be driven, in part, by a templating effect of the substrate. Thin films of metastable CrO2 in (100), (001), and (110) orientations have been stabilized, respectively, by (100), (001), and (110) TiO2 single crystal substrates. In contrast, thin oriented films of the more stable Cr2O3 in (006) orientation are formed when depositing on (0001) Al2O3 single crystals over the same deposition temperature range. This phase selectivity appears to be unique to the chromyl chloride precursor." @default.
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- W2072697647 date "2003-06-17" @default.
- W2072697647 modified "2023-09-27" @default.
- W2072697647 title "Phase-Selective CVD of Chromium Oxides from Chromyl Chloride" @default.
- W2072697647 doi "https://doi.org/10.1002/cvde.200304139" @default.
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