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- W2072796249 abstract "In this study, we introduce a selective thermochemical nano-patterning method of graphene on insulating substrates. A tiny heater formed at the end of an atomic force microscope (AFM) cantilever is optimized by a finite element method. The cantilever device is fabricated using conventional micromachining processes. After preliminary tests of the cantilever device, nano-patterning experiments are conducted with various conducting and insulating samples. The results indicate that faster scanning speed and higher contact force are desirable to reduce the sizes of nano-patterns. With the experimental condition of 1 μm/s and 24 mW, the heated AFM tip generates a graphene oxide layer of 3.6 nm height and 363 nm width, on a 300 nm thick SiO2 layer, with a tip contact force of 100 nN." @default.
- W2072796249 created "2016-06-24" @default.
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- W2072796249 date "2014-04-01" @default.
- W2072796249 modified "2023-09-27" @default.
- W2072796249 title "Selective nano-patterning of graphene using a heated atomic force microscope tip" @default.
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- W2072796249 doi "https://doi.org/10.1063/1.4870588" @default.
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