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- W2072821703 abstract "Surface chemical processes of the silane gas-source molecular beam epitaxy were investigated for Si(100) and Si(111) surfaces by comparing the growth rate with the surface hydrogen coverage during epitaxy. The surface hydrogen coverage was obtained through a thermal desorption measurement just after a quenching of the epitaxy. It was found that the hydrogen desorption process is the major rate-limiting process both on Si(100) and Si(111) surfaces below 600°C." @default.
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- W2072821703 date "1990-10-01" @default.
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- W2072821703 title "Surface Hydrogen Desorption as a Rate-Limiting Process in Silane Gas-Source Molecular Beam Epitaxy" @default.
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- W2072821703 doi "https://doi.org/10.1143/jjap.29.l1881" @default.
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