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- W2072877285 abstract "Abstract A new optical measuring method which can be applied to in-process measurement of surface defects as well as microroughness of ultra-fine finished surfaces with an accuracy of nanometer order is presented in this paper. The principle of our method is based on the Fraunhofer diffraction theory taking account of Gaussian laser beam propagation. The feasibility of the proposed optical method is verified by measurements of the ultra-fine polished silicon wafer surfaces. Consequently, the Fraunhofer diffraction method makes it possible to not only measure microroughness of less than 1nm Rrms, but also detect distinctively micro-scratches, pinholes and particles." @default.
- W2072877285 created "2016-06-24" @default.
- W2072877285 creator A5069300248 @default.
- W2072877285 creator A5075597239 @default.
- W2072877285 creator A5081456479 @default.
- W2072877285 date "1995-01-01" @default.
- W2072877285 modified "2023-09-26" @default.
- W2072877285 title "Nanometer Measurement of Silicon Wafer Surface Texture Based on Fraunhofer Diffraction Pattern" @default.
- W2072877285 cites W1973530063 @default.
- W2072877285 cites W2053841421 @default.
- W2072877285 cites W2139051817 @default.
- W2072877285 cites W2344789777 @default.
- W2072877285 doi "https://doi.org/10.1016/s0007-8506(07)62369-5" @default.
- W2072877285 hasPublicationYear "1995" @default.
- W2072877285 type Work @default.
- W2072877285 sameAs 2072877285 @default.
- W2072877285 citedByCount "6" @default.
- W2072877285 crossrefType "journal-article" @default.
- W2072877285 hasAuthorship W2072877285A5069300248 @default.
- W2072877285 hasAuthorship W2072877285A5075597239 @default.
- W2072877285 hasAuthorship W2072877285A5081456479 @default.
- W2072877285 hasConcept C115961682 @default.
- W2072877285 hasConcept C120665830 @default.
- W2072877285 hasConcept C121332964 @default.
- W2072877285 hasConcept C154945302 @default.
- W2072877285 hasConcept C160671074 @default.
- W2072877285 hasConcept C192562407 @default.
- W2072877285 hasConcept C207114421 @default.
- W2072877285 hasConcept C2524010 @default.
- W2072877285 hasConcept C2776799497 @default.
- W2072877285 hasConcept C2781195486 @default.
- W2072877285 hasConcept C33923547 @default.
- W2072877285 hasConcept C41008148 @default.
- W2072877285 hasConcept C49040817 @default.
- W2072877285 hasConcept C544956773 @default.
- W2072877285 hasConcept C77066764 @default.
- W2072877285 hasConceptScore W2072877285C115961682 @default.
- W2072877285 hasConceptScore W2072877285C120665830 @default.
- W2072877285 hasConceptScore W2072877285C121332964 @default.
- W2072877285 hasConceptScore W2072877285C154945302 @default.
- W2072877285 hasConceptScore W2072877285C160671074 @default.
- W2072877285 hasConceptScore W2072877285C192562407 @default.
- W2072877285 hasConceptScore W2072877285C207114421 @default.
- W2072877285 hasConceptScore W2072877285C2524010 @default.
- W2072877285 hasConceptScore W2072877285C2776799497 @default.
- W2072877285 hasConceptScore W2072877285C2781195486 @default.
- W2072877285 hasConceptScore W2072877285C33923547 @default.
- W2072877285 hasConceptScore W2072877285C41008148 @default.
- W2072877285 hasConceptScore W2072877285C49040817 @default.
- W2072877285 hasConceptScore W2072877285C544956773 @default.
- W2072877285 hasConceptScore W2072877285C77066764 @default.
- W2072877285 hasLocation W20728772851 @default.
- W2072877285 hasOpenAccess W2072877285 @default.
- W2072877285 hasPrimaryLocation W20728772851 @default.
- W2072877285 hasRelatedWork W1974230545 @default.
- W2072877285 hasRelatedWork W1977180862 @default.
- W2072877285 hasRelatedWork W1992423391 @default.
- W2072877285 hasRelatedWork W1995562462 @default.
- W2072877285 hasRelatedWork W2017478466 @default.
- W2072877285 hasRelatedWork W2019833438 @default.
- W2072877285 hasRelatedWork W2029637405 @default.
- W2072877285 hasRelatedWork W2048994451 @default.
- W2072877285 hasRelatedWork W2055506758 @default.
- W2072877285 hasRelatedWork W2064537855 @default.
- W2072877285 hasRelatedWork W2072787605 @default.
- W2072877285 hasRelatedWork W2087750846 @default.
- W2072877285 hasRelatedWork W2246625126 @default.
- W2072877285 hasRelatedWork W2321416199 @default.
- W2072877285 hasRelatedWork W2333223028 @default.
- W2072877285 hasRelatedWork W2353971895 @default.
- W2072877285 hasRelatedWork W2385733660 @default.
- W2072877285 hasRelatedWork W2388925203 @default.
- W2072877285 hasRelatedWork W342772262 @default.
- W2072877285 hasRelatedWork W2084437965 @default.
- W2072877285 isParatext "false" @default.
- W2072877285 isRetracted "false" @default.
- W2072877285 magId "2072877285" @default.
- W2072877285 workType "article" @default.