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• W2072879045 abstract "MEMS micro heater devices capable of long-term operation at temperatures up to 1000 °C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film." @default.
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• W2072879045 date "2007-06-01" @default.
• W2072879045 modified "2023-10-17" @default.
• W2072879045 title "SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations" @default.
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• W2072879045 doi "https://doi.org/10.1016/j.snb.2007.01.004" @default.
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