Matches in SemOpenAlex for { <https://semopenalex.org/work/W2072904455> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2072904455 endingPage "1219" @default.
- W2072904455 startingPage "1211" @default.
- W2072904455 abstract "Bimaterial SiNx/Al infrared cantilever structures are always initially curved because of the imbalanced residual stress in the two layers. Their performance and functionality are therefore significantly decreased. A thorough study of the residual stress (strain) has then become a key issue in the development of bimaterial SiNx/Al cantilever structures. In the curvature-based approach to the film stress, the residual strain is derived from the measured curvature based on certain assumptions on the distribution of the residual strain in the thickness direction. Previous models for a bimaterial cantilever structure, however, are not sufficient to characterize the residual strain in bimaterial SiNx/Al infrared structures. The main goal of this paper is to investigate gradient residual strain in bimaterial SiNx/Al infrared structures. To achieve this goal, the relationship between the residual strain and bending curvature is developed with the assumption that the residual strain in each layer is linearly distributed rather than uniform throughout the thickness. The profile of the gradient strain is then derived from the curvatures measured during the continuous etching of the top-most SiNx in the bimaterial cantilevers. The derived residual strain can then be inverted to predict curvature change further in the etching process. This paper demonstrates that a linear assumption of the residual strain yields a stronger agreement with the measured data in comparison to previously used models. In addition, several factors that may affect measurement accuracy are discussed at the end of the paper." @default.
- W2072904455 created "2016-06-24" @default.
- W2072904455 creator A5042284127 @default.
- W2072904455 creator A5050896453 @default.
- W2072904455 date "2007-05-25" @default.
- W2072904455 modified "2023-09-26" @default.
- W2072904455 title "Study of gradient stress in bimaterial cantilever structures for infrared applications" @default.
- W2072904455 cites W1523109231 @default.
- W2072904455 cites W1989174800 @default.
- W2072904455 cites W1990427359 @default.
- W2072904455 cites W1990683142 @default.
- W2072904455 cites W1992691114 @default.
- W2072904455 cites W1994339459 @default.
- W2072904455 cites W1995336724 @default.
- W2072904455 cites W2000676145 @default.
- W2072904455 cites W2011481574 @default.
- W2072904455 cites W2012082864 @default.
- W2072904455 cites W2014245668 @default.
- W2072904455 cites W2022274429 @default.
- W2072904455 cites W2029992705 @default.
- W2072904455 cites W2030816898 @default.
- W2072904455 cites W2031230344 @default.
- W2072904455 cites W2032547755 @default.
- W2072904455 cites W2039705881 @default.
- W2072904455 cites W2045983010 @default.
- W2072904455 cites W2047864849 @default.
- W2072904455 cites W2052137108 @default.
- W2072904455 cites W2061242844 @default.
- W2072904455 cites W2061837509 @default.
- W2072904455 cites W2062614615 @default.
- W2072904455 cites W2066874036 @default.
- W2072904455 cites W2074817624 @default.
- W2072904455 cites W2091471897 @default.
- W2072904455 cites W2103344824 @default.
- W2072904455 cites W2103524513 @default.
- W2072904455 cites W2122818202 @default.
- W2072904455 cites W2130300793 @default.
- W2072904455 cites W2332580283 @default.
- W2072904455 cites W3117551632 @default.
- W2072904455 doi "https://doi.org/10.1088/0960-1317/17/7/001" @default.
- W2072904455 hasPublicationYear "2007" @default.
- W2072904455 type Work @default.
- W2072904455 sameAs 2072904455 @default.
- W2072904455 citedByCount "14" @default.
- W2072904455 countsByYear W20729044552012 @default.
- W2072904455 countsByYear W20729044552013 @default.
- W2072904455 countsByYear W20729044552014 @default.
- W2072904455 countsByYear W20729044552017 @default.
- W2072904455 countsByYear W20729044552020 @default.
- W2072904455 countsByYear W20729044552022 @default.
- W2072904455 countsByYear W20729044552023 @default.
- W2072904455 crossrefType "journal-article" @default.
- W2072904455 hasAuthorship W2072904455A5042284127 @default.
- W2072904455 hasAuthorship W2072904455A5050896453 @default.
- W2072904455 hasConcept C120665830 @default.
- W2072904455 hasConcept C121332964 @default.
- W2072904455 hasConcept C127413603 @default.
- W2072904455 hasConcept C138885662 @default.
- W2072904455 hasConcept C141354745 @default.
- W2072904455 hasConcept C158355884 @default.
- W2072904455 hasConcept C159985019 @default.
- W2072904455 hasConcept C192562407 @default.
- W2072904455 hasConcept C21036866 @default.
- W2072904455 hasConcept C41895202 @default.
- W2072904455 hasConcept C66938386 @default.
- W2072904455 hasConceptScore W2072904455C120665830 @default.
- W2072904455 hasConceptScore W2072904455C121332964 @default.
- W2072904455 hasConceptScore W2072904455C127413603 @default.
- W2072904455 hasConceptScore W2072904455C138885662 @default.
- W2072904455 hasConceptScore W2072904455C141354745 @default.
- W2072904455 hasConceptScore W2072904455C158355884 @default.
- W2072904455 hasConceptScore W2072904455C159985019 @default.
- W2072904455 hasConceptScore W2072904455C192562407 @default.
- W2072904455 hasConceptScore W2072904455C21036866 @default.
- W2072904455 hasConceptScore W2072904455C41895202 @default.
- W2072904455 hasConceptScore W2072904455C66938386 @default.
- W2072904455 hasIssue "7" @default.
- W2072904455 hasLocation W20729044551 @default.
- W2072904455 hasOpenAccess W2072904455 @default.
- W2072904455 hasPrimaryLocation W20729044551 @default.
- W2072904455 hasRelatedWork W2051270029 @default.
- W2072904455 hasRelatedWork W2082293200 @default.
- W2072904455 hasRelatedWork W2137307547 @default.
- W2072904455 hasRelatedWork W2358751073 @default.
- W2072904455 hasRelatedWork W2380293314 @default.
- W2072904455 hasRelatedWork W2943188944 @default.
- W2072904455 hasRelatedWork W3008690834 @default.
- W2072904455 hasRelatedWork W3082440218 @default.
- W2072904455 hasRelatedWork W4242480814 @default.
- W2072904455 hasRelatedWork W4285802202 @default.
- W2072904455 hasVolume "17" @default.
- W2072904455 isParatext "false" @default.
- W2072904455 isRetracted "false" @default.
- W2072904455 magId "2072904455" @default.
- W2072904455 workType "article" @default.