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- W2072912985 abstract "Purpose The successful use of piezoceramic thick films in sensors and actuators requires a thorough understanding of their electrical and electromechanical characteristics. Since these characteristics depend not only on the material's composition but also on its compatibility with various substrates and a number of processing parameters, accurate measurements of the material's parameters are essential. Here, the aim of this paper is to present a procedure for characterising lead‐zirconate‐titanate (PZT) thick films on pre‐fired low‐temperature co‐fired ceramic (LTCC) substrates performed in order to determine the material parameters for numerical modelling. Design/methodology/approach Owing to the lack of standard procedures for measuring the elastic and piezoelectric properties of the films, the compliance parameters were evaluated from the results of nano‐indentation tests, and a substrate‐flexure method was used to evaluate the transverse piezoelectric coefficients. Findings The validation of the material model and the finite‐element (FE) analysis of the demonstrator sensor/actuator structures are shown to be in agreement with the FE model, even if not an exact fit. Originality/value This paper focuses on a characterisation of PZT thick films screen‐printed on pre‐fired LTCC substrates." @default.
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- W2072912985 date "2008-04-18" @default.
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- W2072912985 title "Experimental and numerical analyses of thick‐film piezoceramic structures for miniaturised sensors and actuators" @default.
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- W2072912985 doi "https://doi.org/10.1108/13565360810875985" @default.
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