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- W2072957773 abstract "A novel method of fabricate ultrathin body (UTB) junctionless TFTs (JLTFT) with sub-10nm poly-Si channel has been successfully demonstrated. It is no additional mask for lithography. The cost of fabrication flow can be reduced by a novel method, that demonstrate at this work. UTB JLTFT has low threshold voltage and steep subthreshold slop 160 mV/dec at W/L=0.7um/1um. An ON/OFF current ratio is about 106, and transconductance does not decrease rapidly at a high drain voltage." @default.
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- W2072957773 date "2012-06-01" @default.
- W2072957773 modified "2023-10-18" @default.
- W2072957773 title "Fabrication and characterization of a Pi-gate ultrathin body junctionless poly-Si TFTs" @default.
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- W2072957773 doi "https://doi.org/10.1109/snw.2012.6243302" @default.
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