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• W2073001845 abstract "Focused ion beam technology continues to scale into the nano regime to keep pace with the scaling of semiconductor processes and biological science research. As the requirements for higher image resolution and machining precision increase, the necessity for comprehensive analysis and fine tuning of the ion beam profile is becoming increasingly important and more challenging. Older techniques such as edge resolution analysis or ion beam spot burns provide only a limited understanding of the ion beam probe current distribution. In this paper, the authors discuss a quantitative ion beam probe current distribution measurement technique. The principle of the approach will be discussed; modeling and empirical results of a gallium beam profile are presented in this paper." @default.
• W2073001845 created "2016-06-24" @default.
• W2073001845 creator A5001156461 @default.
• W2073001845 creator A5002299846 @default.
• W2073001845 creator A5018231776 @default.
• W2073001845 creator A5067143275 @default.
• W2073001845 creator A5079065300 @default.
• W2073001845 date "2012-11-01" @default.
• W2073001845 modified "2023-10-05" @default.
• W2073001845 title "Probe current distribution characterization technique for focused ion beam" @default.
• W2073001845 cites W1964764543 @default.
• W2073001845 cites W1966118057 @default.
• W2073001845 cites W1968371004 @default.
• W2073001845 cites W1989809856 @default.
• W2073001845 cites W1990535745 @default.
• W2073001845 cites W1993374353 @default.
• W2073001845 cites W2001748732 @default.
• W2073001845 cites W2003730697 @default.
• W2073001845 cites W2007019865 @default.
• W2073001845 cites W2008988964 @default.
• W2073001845 cites W2024277794 @default.
• W2073001845 cites W2027658025 @default.
• W2073001845 cites W2028584733 @default.
• W2073001845 cites W2052423998 @default.
• W2073001845 cites W2081362399 @default.
• W2073001845 cites W2081591253 @default.
• W2073001845 cites W2085285825 @default.
• W2073001845 cites W2097585880 @default.
• W2073001845 cites W2123813117 @default.
• W2073001845 cites W2156666549 @default.
• W2073001845 cites W2157866232 @default.
• W2073001845 doi "https://doi.org/10.1116/1.4766882" @default.
• W2073001845 hasPublicationYear "2012" @default.
• W2073001845 type Work @default.
• W2073001845 sameAs 2073001845 @default.
• W2073001845 citedByCount "25" @default.
• W2073001845 countsByYear W20730018452014 @default.
• W2073001845 countsByYear W20730018452015 @default.
• W2073001845 countsByYear W20730018452016 @default.
• W2073001845 countsByYear W20730018452017 @default.
• W2073001845 countsByYear W20730018452018 @default.
• W2073001845 countsByYear W20730018452019 @default.
• W2073001845 countsByYear W20730018452020 @default.
• W2073001845 countsByYear W20730018452021 @default.
• W2073001845 countsByYear W20730018452022 @default.
• W2073001845 countsByYear W20730018452023 @default.
• W2073001845 crossrefType "journal-article" @default.
• W2073001845 hasAuthorship W2073001845A5001156461 @default.
• W2073001845 hasAuthorship W2073001845A5002299846 @default.
• W2073001845 hasAuthorship W2073001845A5018231776 @default.
• W2073001845 hasAuthorship W2073001845A5067143275 @default.
• W2073001845 hasAuthorship W2073001845A5079065300 @default.
• W2073001845 hasConcept C119599485 @default.
• W2073001845 hasConcept C120665830 @default.
• W2073001845 hasConcept C121332964 @default.
• W2073001845 hasConcept C127413603 @default.
• W2073001845 hasConcept C145148216 @default.
• W2073001845 hasConcept C148043351 @default.
• W2073001845 hasConcept C161866238 @default.
• W2073001845 hasConcept C168834538 @default.
• W2073001845 hasConcept C171250308 @default.
• W2073001845 hasConcept C192562407 @default.
• W2073001845 hasConcept C2524010 @default.
• W2073001845 hasConcept C2780841128 @default.
• W2073001845 hasConcept C33923547 @default.
• W2073001845 hasConcept C50774322 @default.
• W2073001845 hasConcept C62520636 @default.
• W2073001845 hasConcept C93106096 @default.
• W2073001845 hasConcept C99844830 @default.
• W2073001845 hasConceptScore W2073001845C119599485 @default.
• W2073001845 hasConceptScore W2073001845C120665830 @default.
• W2073001845 hasConceptScore W2073001845C121332964 @default.
• W2073001845 hasConceptScore W2073001845C127413603 @default.
• W2073001845 hasConceptScore W2073001845C145148216 @default.
• W2073001845 hasConceptScore W2073001845C148043351 @default.
• W2073001845 hasConceptScore W2073001845C161866238 @default.
• W2073001845 hasConceptScore W2073001845C168834538 @default.
• W2073001845 hasConceptScore W2073001845C171250308 @default.
• W2073001845 hasConceptScore W2073001845C192562407 @default.
• W2073001845 hasConceptScore W2073001845C2524010 @default.
• W2073001845 hasConceptScore W2073001845C2780841128 @default.
• W2073001845 hasConceptScore W2073001845C33923547 @default.
• W2073001845 hasConceptScore W2073001845C50774322 @default.
• W2073001845 hasConceptScore W2073001845C62520636 @default.
• W2073001845 hasConceptScore W2073001845C93106096 @default.
• W2073001845 hasConceptScore W2073001845C99844830 @default.
• W2073001845 hasIssue "6" @default.
• W2073001845 hasLocation W20730018451 @default.
• W2073001845 hasOpenAccess W2073001845 @default.
• W2073001845 hasPrimaryLocation W20730018451 @default.
• W2073001845 hasRelatedWork W1963346894 @default.
• W2073001845 hasRelatedWork W1992059889 @default.
• W2073001845 hasRelatedWork W2001889668 @default.
• W2073001845 hasRelatedWork W2001967553 @default.
• W2073001845 hasRelatedWork W2010269588 @default.
• W2073001845 hasRelatedWork W2034389235 @default.
• W2073001845 hasRelatedWork W2052029191 @default.
• W2073001845 hasRelatedWork W2060672296 @default.
• W2073001845 hasRelatedWork W2072218314 @default.
• W2073001845 hasRelatedWork W2118833667 @default.

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