Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073003711> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W2073003711 abstract "Plasma doping has been accepted into semiconductor manufacturing for two low energy, high dose implant applications. The p‐type polysilicon counter‐doping and contact doping for DRAM devices can be carried out using BF3 or B2H6 precursor gas. The choice between these two precursors depends on the benefits and constraints of each one. In order to identify these benefits and constraints, the boron dopant profile responses to dose variation for both precursors have been studied using the PULSION plasma doping tool." @default.
- W2073003711 created "2016-06-24" @default.
- W2073003711 creator A5000111824 @default.
- W2073003711 creator A5039494720 @default.
- W2073003711 creator A5048340995 @default.
- W2073003711 creator A5051051705 @default.
- W2073003711 creator A5056786763 @default.
- W2073003711 creator A5061852412 @default.
- W2073003711 date "2011-01-01" @default.
- W2073003711 modified "2023-09-23" @default.
- W2073003711 title "Different Profile Responses to Dose Variation for B[sub 2]H[sub 6] and BF[sub 3] Plasma Doping using PULSION®" @default.
- W2073003711 cites W1622923104 @default.
- W2073003711 cites W1632647073 @default.
- W2073003711 cites W1978361229 @default.
- W2073003711 doi "https://doi.org/10.1063/1.3548336" @default.
- W2073003711 hasPublicationYear "2011" @default.
- W2073003711 type Work @default.
- W2073003711 sameAs 2073003711 @default.
- W2073003711 citedByCount "0" @default.
- W2073003711 crossrefType "proceedings-article" @default.
- W2073003711 hasAuthorship W2073003711A5000111824 @default.
- W2073003711 hasAuthorship W2073003711A5039494720 @default.
- W2073003711 hasAuthorship W2073003711A5048340995 @default.
- W2073003711 hasAuthorship W2073003711A5051051705 @default.
- W2073003711 hasAuthorship W2073003711A5056786763 @default.
- W2073003711 hasAuthorship W2073003711A5061852412 @default.
- W2073003711 hasConcept C107872376 @default.
- W2073003711 hasConcept C108225325 @default.
- W2073003711 hasConcept C113196181 @default.
- W2073003711 hasConcept C121332964 @default.
- W2073003711 hasConcept C178790620 @default.
- W2073003711 hasConcept C185592680 @default.
- W2073003711 hasConcept C191952053 @default.
- W2073003711 hasConcept C192562407 @default.
- W2073003711 hasConcept C49040817 @default.
- W2073003711 hasConcept C501308230 @default.
- W2073003711 hasConcept C57863236 @default.
- W2073003711 hasConcept C62520636 @default.
- W2073003711 hasConcept C7366592 @default.
- W2073003711 hasConcept C82706917 @default.
- W2073003711 hasConceptScore W2073003711C107872376 @default.
- W2073003711 hasConceptScore W2073003711C108225325 @default.
- W2073003711 hasConceptScore W2073003711C113196181 @default.
- W2073003711 hasConceptScore W2073003711C121332964 @default.
- W2073003711 hasConceptScore W2073003711C178790620 @default.
- W2073003711 hasConceptScore W2073003711C185592680 @default.
- W2073003711 hasConceptScore W2073003711C191952053 @default.
- W2073003711 hasConceptScore W2073003711C192562407 @default.
- W2073003711 hasConceptScore W2073003711C49040817 @default.
- W2073003711 hasConceptScore W2073003711C501308230 @default.
- W2073003711 hasConceptScore W2073003711C57863236 @default.
- W2073003711 hasConceptScore W2073003711C62520636 @default.
- W2073003711 hasConceptScore W2073003711C7366592 @default.
- W2073003711 hasConceptScore W2073003711C82706917 @default.
- W2073003711 hasLocation W20730037111 @default.
- W2073003711 hasOpenAccess W2073003711 @default.
- W2073003711 hasPrimaryLocation W20730037111 @default.
- W2073003711 hasRelatedWork W1550202202 @default.
- W2073003711 hasRelatedWork W1966205888 @default.
- W2073003711 hasRelatedWork W2014893616 @default.
- W2073003711 hasRelatedWork W2018156315 @default.
- W2073003711 hasRelatedWork W2114066690 @default.
- W2073003711 hasRelatedWork W2123642858 @default.
- W2073003711 hasRelatedWork W2900384034 @default.
- W2073003711 hasRelatedWork W3040644752 @default.
- W2073003711 hasRelatedWork W3173404886 @default.
- W2073003711 hasRelatedWork W4293659473 @default.
- W2073003711 isParatext "false" @default.
- W2073003711 isRetracted "false" @default.
- W2073003711 magId "2073003711" @default.
- W2073003711 workType "article" @default.