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- W2073035136 abstract "Line end shortening is a phenomenon originating from a combination of imperfect aerial image formation of the line end and acid diffusion in chemically amplified resists. For geometries at 0.25 micrometers and below, line end shortening has become a concern in photolithography. Because of the complex coupling between the optical effect and the acid diffusion, accurate and reliable prediction of line end shortening form theory is difficult. Experimental characterization of line end shortening is thus required. In this study, line end shortening was measured on OPAL CD SEM using a special measurement algorithm. Our experimental results show that both NA and (sigma) affect line end shortening, higher (sigma) are preferred to reduce line end shortening. PEB time has little effect on line end shortening, while line end shortening increases with PEB temperature only when it reaches a chemical mechanism transition temperature. The most effective way to minimize and control line end shortening is through optical proximity correction. By optimizing the serif size, not only the desired line end dimension can be achieved, but also its process latitude is greatly improved." @default.
- W2073035136 created "2016-06-24" @default.
- W2073035136 creator A5008225061 @default.
- W2073035136 creator A5055283353 @default.
- W2073035136 creator A5061026536 @default.
- W2073035136 creator A5071452996 @default.
- W2073035136 creator A5081755546 @default.
- W2073035136 creator A5083902642 @default.
- W2073035136 date "1999-06-11" @default.
- W2073035136 modified "2023-09-23" @default.
- W2073035136 title "Experimental study of line-end shortening" @default.
- W2073035136 doi "https://doi.org/10.1117/12.350266" @default.
- W2073035136 hasPublicationYear "1999" @default.
- W2073035136 type Work @default.
- W2073035136 sameAs 2073035136 @default.
- W2073035136 citedByCount "5" @default.
- W2073035136 countsByYear W20730351362013 @default.
- W2073035136 countsByYear W20730351362018 @default.
- W2073035136 crossrefType "proceedings-article" @default.
- W2073035136 hasAuthorship W2073035136A5008225061 @default.
- W2073035136 hasAuthorship W2073035136A5055283353 @default.
- W2073035136 hasAuthorship W2073035136A5061026536 @default.
- W2073035136 hasAuthorship W2073035136A5071452996 @default.
- W2073035136 hasAuthorship W2073035136A5081755546 @default.
- W2073035136 hasAuthorship W2073035136A5083902642 @default.
- W2073035136 hasConcept C105487726 @default.
- W2073035136 hasConcept C120665830 @default.
- W2073035136 hasConcept C121332964 @default.
- W2073035136 hasConcept C131584629 @default.
- W2073035136 hasConcept C159985019 @default.
- W2073035136 hasConcept C192562407 @default.
- W2073035136 hasConcept C198352243 @default.
- W2073035136 hasConcept C207789793 @default.
- W2073035136 hasConcept C2524010 @default.
- W2073035136 hasConcept C33923547 @default.
- W2073035136 hasConcept C49040817 @default.
- W2073035136 hasConcept C69357855 @default.
- W2073035136 hasConcept C97355855 @default.
- W2073035136 hasConceptScore W2073035136C105487726 @default.
- W2073035136 hasConceptScore W2073035136C120665830 @default.
- W2073035136 hasConceptScore W2073035136C121332964 @default.
- W2073035136 hasConceptScore W2073035136C131584629 @default.
- W2073035136 hasConceptScore W2073035136C159985019 @default.
- W2073035136 hasConceptScore W2073035136C192562407 @default.
- W2073035136 hasConceptScore W2073035136C198352243 @default.
- W2073035136 hasConceptScore W2073035136C207789793 @default.
- W2073035136 hasConceptScore W2073035136C2524010 @default.
- W2073035136 hasConceptScore W2073035136C33923547 @default.
- W2073035136 hasConceptScore W2073035136C49040817 @default.
- W2073035136 hasConceptScore W2073035136C69357855 @default.
- W2073035136 hasConceptScore W2073035136C97355855 @default.
- W2073035136 hasLocation W20730351361 @default.
- W2073035136 hasOpenAccess W2073035136 @default.
- W2073035136 hasPrimaryLocation W20730351361 @default.
- W2073035136 hasRelatedWork W1973071557 @default.
- W2073035136 hasRelatedWork W1983728593 @default.
- W2073035136 hasRelatedWork W2007310023 @default.
- W2073035136 hasRelatedWork W2036075172 @default.
- W2073035136 hasRelatedWork W2063931086 @default.
- W2073035136 hasRelatedWork W2073796970 @default.
- W2073035136 hasRelatedWork W2123343344 @default.
- W2073035136 hasRelatedWork W2932208872 @default.
- W2073035136 hasRelatedWork W4281622355 @default.
- W2073035136 hasRelatedWork W4309004064 @default.
- W2073035136 isParatext "false" @default.
- W2073035136 isRetracted "false" @default.
- W2073035136 magId "2073035136" @default.
- W2073035136 workType "article" @default.