Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073162017> ?p ?o ?g. }
- W2073162017 endingPage "1156" @default.
- W2073162017 startingPage "1154" @default.
- W2073162017 abstract "We investigate vanadium (V)-based ohmic contacts on n-GaN (Nd=2.0×1018 cm−3) as a function of annealing temperature. It is shown that the V (60 nm) contacts become ohmic with specific contact resistances of 10−3–10−4 Ω cm2 upon annealing at 650 and 850 °C. The V (20 nm)/Ti (60 nm)/Au (20 nm) contacts produce very low specific contact resistances of 2.2×10−5 and 4.0×10−6 Ω cm2 when annealed at 650 and 850 °C, respectively. A comparison shows that the use of the overlayers (Ti/Au) is very effective in improving ohmic property. Based on Auger electron spectroscopy and glancing-angle x-ray diffraction results, possible explanations for the annealing temperature dependence of the ohmic behavior of the V-based contacts are described and discussed." @default.
- W2073162017 created "2016-06-24" @default.
- W2073162017 creator A5008429153 @default.
- W2073162017 creator A5017531565 @default.
- W2073162017 creator A5020908687 @default.
- W2073162017 creator A5041675170 @default.
- W2073162017 date "2003-08-05" @default.
- W2073162017 modified "2023-10-16" @default.
- W2073162017 title "Formation of vanadium-based ohmic contacts to n-GaN" @default.
- W2073162017 cites W1560113158 @default.
- W2073162017 cites W1968230864 @default.
- W2073162017 cites W1973949107 @default.
- W2073162017 cites W1977433303 @default.
- W2073162017 cites W1977920155 @default.
- W2073162017 cites W1984586051 @default.
- W2073162017 cites W2000628961 @default.
- W2073162017 cites W2001909831 @default.
- W2073162017 cites W2011159000 @default.
- W2073162017 cites W2020627146 @default.
- W2073162017 cites W2027633497 @default.
- W2073162017 cites W2032172227 @default.
- W2073162017 cites W2056327721 @default.
- W2073162017 cites W2061108516 @default.
- W2073162017 cites W2063964289 @default.
- W2073162017 cites W2068153354 @default.
- W2073162017 cites W2077240118 @default.
- W2073162017 cites W2079400757 @default.
- W2073162017 cites W2086994056 @default.
- W2073162017 cites W2089878483 @default.
- W2073162017 cites W2126473095 @default.
- W2073162017 cites W2137921628 @default.
- W2073162017 doi "https://doi.org/10.1063/1.1598284" @default.
- W2073162017 hasPublicationYear "2003" @default.
- W2073162017 type Work @default.
- W2073162017 sameAs 2073162017 @default.
- W2073162017 citedByCount "32" @default.
- W2073162017 countsByYear W20731620172012 @default.
- W2073162017 countsByYear W20731620172014 @default.
- W2073162017 countsByYear W20731620172015 @default.
- W2073162017 countsByYear W20731620172017 @default.
- W2073162017 countsByYear W20731620172020 @default.
- W2073162017 countsByYear W20731620172022 @default.
- W2073162017 countsByYear W20731620172023 @default.
- W2073162017 crossrefType "journal-article" @default.
- W2073162017 hasAuthorship W2073162017A5008429153 @default.
- W2073162017 hasAuthorship W2073162017A5017531565 @default.
- W2073162017 hasAuthorship W2073162017A5020908687 @default.
- W2073162017 hasAuthorship W2073162017A5041675170 @default.
- W2073162017 hasConcept C113196181 @default.
- W2073162017 hasConcept C120665830 @default.
- W2073162017 hasConcept C121332964 @default.
- W2073162017 hasConcept C123671423 @default.
- W2073162017 hasConcept C138230450 @default.
- W2073162017 hasConcept C171250308 @default.
- W2073162017 hasConcept C185544564 @default.
- W2073162017 hasConcept C185592680 @default.
- W2073162017 hasConcept C191897082 @default.
- W2073162017 hasConcept C192562407 @default.
- W2073162017 hasConcept C207114421 @default.
- W2073162017 hasConcept C25442681 @default.
- W2073162017 hasConcept C2777855556 @default.
- W2073162017 hasConcept C2779227376 @default.
- W2073162017 hasConcept C43617362 @default.
- W2073162017 hasConcept C49040817 @default.
- W2073162017 hasConcept C504678139 @default.
- W2073162017 hasConceptScore W2073162017C113196181 @default.
- W2073162017 hasConceptScore W2073162017C120665830 @default.
- W2073162017 hasConceptScore W2073162017C121332964 @default.
- W2073162017 hasConceptScore W2073162017C123671423 @default.
- W2073162017 hasConceptScore W2073162017C138230450 @default.
- W2073162017 hasConceptScore W2073162017C171250308 @default.
- W2073162017 hasConceptScore W2073162017C185544564 @default.
- W2073162017 hasConceptScore W2073162017C185592680 @default.
- W2073162017 hasConceptScore W2073162017C191897082 @default.
- W2073162017 hasConceptScore W2073162017C192562407 @default.
- W2073162017 hasConceptScore W2073162017C207114421 @default.
- W2073162017 hasConceptScore W2073162017C25442681 @default.
- W2073162017 hasConceptScore W2073162017C2777855556 @default.
- W2073162017 hasConceptScore W2073162017C2779227376 @default.
- W2073162017 hasConceptScore W2073162017C43617362 @default.
- W2073162017 hasConceptScore W2073162017C49040817 @default.
- W2073162017 hasConceptScore W2073162017C504678139 @default.
- W2073162017 hasIssue "6" @default.
- W2073162017 hasLocation W20731620171 @default.
- W2073162017 hasOpenAccess W2073162017 @default.
- W2073162017 hasPrimaryLocation W20731620171 @default.
- W2073162017 hasRelatedWork W1860454623 @default.
- W2073162017 hasRelatedWork W1991671539 @default.
- W2073162017 hasRelatedWork W1996456739 @default.
- W2073162017 hasRelatedWork W2010729172 @default.
- W2073162017 hasRelatedWork W2054989438 @default.
- W2073162017 hasRelatedWork W2059821908 @default.
- W2073162017 hasRelatedWork W2063877652 @default.
- W2073162017 hasRelatedWork W2073162017 @default.
- W2073162017 hasRelatedWork W2752947955 @default.
- W2073162017 hasRelatedWork W2794037016 @default.
- W2073162017 hasVolume "83" @default.
- W2073162017 isParatext "false" @default.