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• W2073166871 endingPage "400" @default.
• W2073166871 startingPage "388" @default.
• W2073166871 abstract "Chemical–mechanical planarization (CMP) of copper has now become an integral part of materials processing in the fabrication of integrated circuits. This process requires the application of a considerable down-force to the sample in its polishing step, and hence could be unsuitable for systems containing mechanically weak dielectric layers under the Cu lines. Recently, electrochemical–mechanical planarization (ECMP) has emerged as a possible extension of CMP, where through voltage-activated removal of Cu surface layers, one can substantially minimize the down-force necessary for mechanical polishing. However, the detailed electrochemical factors that are central to designing efficient abrasive-free electrolytes for ECMP are not clearly understood at the present time. In the present work, we address this issue by studying the relative electrochemical effects of different chemical additives in a peroxide based glycine solution commonly used in CMP slurries for Cu. More specifically, our analysis focuses here on the individual and combined roles of NO3− (background anion), H2O2 (oxidizer) and glycine (complexing agent) in voltage controlled material removal from Cu in the absence of mechanical polishing." @default.
• W2073166871 created "2016-06-24" @default.
• W2073166871 creator A5047689482 @default.
• W2073166871 creator A5070965594 @default.
• W2073166871 date "2005-12-01" @default.
• W2073166871 modified "2023-09-30" @default.
• W2073166871 title "Electrochemical–mechanical planarization of copper: Effects of chemical additives on voltage controlled removal of surface layers in electrolytes" @default.
• W2073166871 cites W1972284349 @default.
• W2073166871 cites W1972361556 @default.
• W2073166871 cites W1975019521 @default.
• W2073166871 cites W1978180480 @default.
• W2073166871 cites W1979791029 @default.
• W2073166871 cites W1982159690 @default.
• W2073166871 cites W1982937072 @default.
• W2073166871 cites W1990498951 @default.
• W2073166871 cites W1991964172 @default.
• W2073166871 cites W2002559665 @default.
• W2073166871 cites W2006443565 @default.
• W2073166871 cites W2012294467 @default.
• W2073166871 cites W2013754301 @default.
• W2073166871 cites W2014035657 @default.
• W2073166871 cites W2014806565 @default.
• W2073166871 cites W2015829845 @default.
• W2073166871 cites W2028072670 @default.
• W2073166871 cites W2034938716 @default.
• W2073166871 cites W2037509636 @default.
• W2073166871 cites W2037859153 @default.
• W2073166871 cites W2040838742 @default.
• W2073166871 cites W2042103093 @default.
• W2073166871 cites W2048834918 @default.
• W2073166871 cites W2049230339 @default.
• W2073166871 cites W2049746993 @default.
• W2073166871 cites W2054267713 @default.
• W2073166871 cites W2064660169 @default.
• W2073166871 cites W2067714612 @default.
• W2073166871 cites W2068941551 @default.
• W2073166871 cites W2073433607 @default.
• W2073166871 cites W2075370169 @default.
• W2073166871 cites W2076031418 @default.
• W2073166871 cites W2077108693 @default.
• W2073166871 cites W2084707680 @default.
• W2073166871 cites W2089738059 @default.
• W2073166871 cites W2094398328 @default.
• W2073166871 cites W2094693730 @default.
• W2073166871 cites W2111661209 @default.
• W2073166871 cites W2146908662 @default.
• W2073166871 cites W2160494993 @default.
• W2073166871 doi "https://doi.org/10.1016/j.matchemphys.2005.05.020" @default.
• W2073166871 hasPublicationYear "2005" @default.
• W2073166871 type Work @default.
• W2073166871 sameAs 2073166871 @default.
• W2073166871 citedByCount "38" @default.
• W2073166871 countsByYear W20731668712012 @default.
• W2073166871 countsByYear W20731668712013 @default.
• W2073166871 countsByYear W20731668712015 @default.
• W2073166871 countsByYear W20731668712016 @default.
• W2073166871 countsByYear W20731668712018 @default.
• W2073166871 countsByYear W20731668712020 @default.
• W2073166871 countsByYear W20731668712021 @default.
• W2073166871 countsByYear W20731668712023 @default.
• W2073166871 crossrefType "journal-article" @default.
• W2073166871 hasAuthorship W2073166871A5047689482 @default.
• W2073166871 hasAuthorship W2073166871A5070965594 @default.
• W2073166871 hasConcept C127413603 @default.
• W2073166871 hasConcept C138113353 @default.
• W2073166871 hasConcept C147789679 @default.
• W2073166871 hasConcept C159985019 @default.
• W2073166871 hasConcept C171250308 @default.
• W2073166871 hasConcept C17525397 @default.
• W2073166871 hasConcept C180088628 @default.
• W2073166871 hasConcept C185592680 @default.
• W2073166871 hasConcept C191897082 @default.
• W2073166871 hasConcept C192562407 @default.
• W2073166871 hasConcept C2780957350 @default.
• W2073166871 hasConcept C42360764 @default.
• W2073166871 hasConcept C52859227 @default.
• W2073166871 hasConcept C544778455 @default.
• W2073166871 hasConcept C68801617 @default.
• W2073166871 hasConcept C94293008 @default.
• W2073166871 hasConceptScore W2073166871C127413603 @default.
• W2073166871 hasConceptScore W2073166871C138113353 @default.
• W2073166871 hasConceptScore W2073166871C147789679 @default.
• W2073166871 hasConceptScore W2073166871C159985019 @default.
• W2073166871 hasConceptScore W2073166871C171250308 @default.
• W2073166871 hasConceptScore W2073166871C17525397 @default.
• W2073166871 hasConceptScore W2073166871C180088628 @default.
• W2073166871 hasConceptScore W2073166871C185592680 @default.
• W2073166871 hasConceptScore W2073166871C191897082 @default.
• W2073166871 hasConceptScore W2073166871C192562407 @default.
• W2073166871 hasConceptScore W2073166871C2780957350 @default.
• W2073166871 hasConceptScore W2073166871C42360764 @default.
• W2073166871 hasConceptScore W2073166871C52859227 @default.
• W2073166871 hasConceptScore W2073166871C544778455 @default.
• W2073166871 hasConceptScore W2073166871C68801617 @default.
• W2073166871 hasConceptScore W2073166871C94293008 @default.
• W2073166871 hasIssue "2-3" @default.
• W2073166871 hasLocation W20731668711 @default.
• W2073166871 hasOpenAccess W2073166871 @default.

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