Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073197152> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2073197152 endingPage "823" @default.
- W2073197152 startingPage "817" @default.
- W2073197152 abstract "Laser-induced fluorescence has been used to determine the relative density of Cl+2 in a chlorine radio frequency discharge as a function of pressure, flow, power, frequency, and distance from the electrodes. The conditions studied correspond closely to those used in anisotropic plasma etching of materials such as Si and InP. This technique provides quantitative data on ion densities over a wide range of parameters, as contrasted with qualitative methods, such as optical emission." @default.
- W2073197152 created "2016-06-24" @default.
- W2073197152 creator A5007489890 @default.
- W2073197152 creator A5051005803 @default.
- W2073197152 creator A5065267496 @default.
- W2073197152 date "1982-09-01" @default.
- W2073197152 modified "2023-10-16" @default.
- W2073197152 title "Laser diagnostics of plasma etching: Measurement of Cl+2 in a chlorine discharge" @default.
- W2073197152 doi "https://doi.org/10.1116/1.571829" @default.
- W2073197152 hasPublicationYear "1982" @default.
- W2073197152 type Work @default.
- W2073197152 sameAs 2073197152 @default.
- W2073197152 citedByCount "99" @default.
- W2073197152 countsByYear W20731971522012 @default.
- W2073197152 countsByYear W20731971522013 @default.
- W2073197152 countsByYear W20731971522014 @default.
- W2073197152 countsByYear W20731971522016 @default.
- W2073197152 countsByYear W20731971522017 @default.
- W2073197152 crossrefType "journal-article" @default.
- W2073197152 hasAuthorship W2073197152A5007489890 @default.
- W2073197152 hasAuthorship W2073197152A5051005803 @default.
- W2073197152 hasAuthorship W2073197152A5065267496 @default.
- W2073197152 hasConcept C100460472 @default.
- W2073197152 hasConcept C107187091 @default.
- W2073197152 hasConcept C113196181 @default.
- W2073197152 hasConcept C120665830 @default.
- W2073197152 hasConcept C121332964 @default.
- W2073197152 hasConcept C130472188 @default.
- W2073197152 hasConcept C145148216 @default.
- W2073197152 hasConcept C159985019 @default.
- W2073197152 hasConcept C171250308 @default.
- W2073197152 hasConcept C178790620 @default.
- W2073197152 hasConcept C184779094 @default.
- W2073197152 hasConcept C185592680 @default.
- W2073197152 hasConcept C191897082 @default.
- W2073197152 hasConcept C192039680 @default.
- W2073197152 hasConcept C192562407 @default.
- W2073197152 hasConcept C204323151 @default.
- W2073197152 hasConcept C2779227376 @default.
- W2073197152 hasConcept C43503373 @default.
- W2073197152 hasConcept C43617362 @default.
- W2073197152 hasConcept C505241676 @default.
- W2073197152 hasConcept C520434653 @default.
- W2073197152 hasConcept C62520636 @default.
- W2073197152 hasConcept C82706917 @default.
- W2073197152 hasConcept C85725439 @default.
- W2073197152 hasConceptScore W2073197152C100460472 @default.
- W2073197152 hasConceptScore W2073197152C107187091 @default.
- W2073197152 hasConceptScore W2073197152C113196181 @default.
- W2073197152 hasConceptScore W2073197152C120665830 @default.
- W2073197152 hasConceptScore W2073197152C121332964 @default.
- W2073197152 hasConceptScore W2073197152C130472188 @default.
- W2073197152 hasConceptScore W2073197152C145148216 @default.
- W2073197152 hasConceptScore W2073197152C159985019 @default.
- W2073197152 hasConceptScore W2073197152C171250308 @default.
- W2073197152 hasConceptScore W2073197152C178790620 @default.
- W2073197152 hasConceptScore W2073197152C184779094 @default.
- W2073197152 hasConceptScore W2073197152C185592680 @default.
- W2073197152 hasConceptScore W2073197152C191897082 @default.
- W2073197152 hasConceptScore W2073197152C192039680 @default.
- W2073197152 hasConceptScore W2073197152C192562407 @default.
- W2073197152 hasConceptScore W2073197152C204323151 @default.
- W2073197152 hasConceptScore W2073197152C2779227376 @default.
- W2073197152 hasConceptScore W2073197152C43503373 @default.
- W2073197152 hasConceptScore W2073197152C43617362 @default.
- W2073197152 hasConceptScore W2073197152C505241676 @default.
- W2073197152 hasConceptScore W2073197152C520434653 @default.
- W2073197152 hasConceptScore W2073197152C62520636 @default.
- W2073197152 hasConceptScore W2073197152C82706917 @default.
- W2073197152 hasConceptScore W2073197152C85725439 @default.
- W2073197152 hasIssue "3" @default.
- W2073197152 hasLocation W20731971521 @default.
- W2073197152 hasOpenAccess W2073197152 @default.
- W2073197152 hasPrimaryLocation W20731971521 @default.
- W2073197152 hasRelatedWork W1617534506 @default.
- W2073197152 hasRelatedWork W2011835277 @default.
- W2073197152 hasRelatedWork W2018162217 @default.
- W2073197152 hasRelatedWork W2022949630 @default.
- W2073197152 hasRelatedWork W2049342529 @default.
- W2073197152 hasRelatedWork W2059112004 @default.
- W2073197152 hasRelatedWork W2119343688 @default.
- W2073197152 hasRelatedWork W2366161362 @default.
- W2073197152 hasRelatedWork W3197419717 @default.
- W2073197152 hasRelatedWork W4291916140 @default.
- W2073197152 hasVolume "21" @default.
- W2073197152 isParatext "false" @default.
- W2073197152 isRetracted "false" @default.
- W2073197152 magId "2073197152" @default.
- W2073197152 workType "article" @default.