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• W2073201741 abstract "A new position sensor based on laterally movable gate FET (LMGFET) sensing element has been designed and fabricated. The position sensor is designed to operate in a differential mode, which increases device sensitivity and performance. The moving proof mass is supported on each end by a folded beam which is also employed as a spring to restrain motion. The simulated value of the folded beam spring constant designed in this work is 44.8 N/m. The LMGFET microstructure is fabricated by a four-mask LIGA-like post-IC process compatible with standard CMOS fabrication technology. p+ region is ion-implanted under the moving structure as a ground plane and also to decrease leakage currents. Plasma ashing is employed to avoid stiction. The design of the sensor along with fabrication steps is described. Preliminary results on the electrical behavior of the fabricated LMGFET are given." @default.
• W2073201741 created "2016-06-24" @default.
• W2073201741 creator A5025015274 @default.
• W2073201741 creator A5073610568 @default.
• W2073201741 date "2004-07-29" @default.
• W2073201741 modified "2023-10-18" @default.
• W2073201741 title "Differential laterally movable gate FETs (LMGFETs) as a position sensor" @default.
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• W2073201741 doi "https://doi.org/10.1117/12.539782" @default.
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