Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073243337> ?p ?o ?g. }
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- W2073243337 endingPage "269" @default.
- W2073243337 startingPage "263" @default.
- W2073243337 abstract "Relaxed Si0.7Ge0.3 epitaxial layers that possess threading defect densities as low as 5×105 cm−2 have been grown on Si substrates by rapid thermal chemical vapor deposition. The layers were formed in a series of steps of constant Ge content, each step with either 6% or 3% more Ge than the previous one. At the low average grading rates investigated, the number of steps used to reach 30% Ge only slightly affected the density of individual threading dislocations, imaged by electron beam induced current (EBIC). However, the density of dark-line defects seen in EBIC, which are formed from pile-ups of threading dislocations, was strongly influenced only by the average grading rate. Both the dark line density and the dark spot density must be considered when assessing the surface of these relaxed layers." @default.
- W2073243337 created "2016-06-24" @default.
- W2073243337 creator A5005790097 @default.
- W2073243337 creator A5010924468 @default.
- W2073243337 creator A5025668571 @default.
- W2073243337 creator A5088768173 @default.
- W2073243337 date "1994-01-01" @default.
- W2073243337 modified "2023-10-18" @default.
- W2073243337 title "Relaxed, low threading defect density Si<sub>0.7</sub>Ge<sub>0.3</sub>epitaxial layers grown on Si by rapid thermal chemical vapor deposition" @default.
- W2073243337 cites W1969995533 @default.
- W2073243337 cites W1974392832 @default.
- W2073243337 cites W1980739628 @default.
- W2073243337 cites W1993337970 @default.
- W2073243337 cites W2035581440 @default.
- W2073243337 cites W2042623839 @default.
- W2073243337 cites W2047174501 @default.
- W2073243337 cites W2047432759 @default.
- W2073243337 cites W2050773415 @default.
- W2073243337 cites W2056375837 @default.
- W2073243337 cites W2058242483 @default.
- W2073243337 cites W2059657034 @default.
- W2073243337 cites W2062022071 @default.
- W2073243337 doi "https://doi.org/10.1063/1.355894" @default.
- W2073243337 hasPublicationYear "1994" @default.
- W2073243337 type Work @default.
- W2073243337 sameAs 2073243337 @default.
- W2073243337 citedByCount "54" @default.
- W2073243337 countsByYear W20732433372013 @default.
- W2073243337 countsByYear W20732433372014 @default.
- W2073243337 countsByYear W20732433372015 @default.
- W2073243337 countsByYear W20732433372019 @default.
- W2073243337 crossrefType "journal-article" @default.
- W2073243337 hasAuthorship W2073243337A5005790097 @default.
- W2073243337 hasAuthorship W2073243337A5010924468 @default.
- W2073243337 hasAuthorship W2073243337A5025668571 @default.
- W2073243337 hasAuthorship W2073243337A5088768173 @default.
- W2073243337 hasConcept C110738630 @default.
- W2073243337 hasConcept C113196181 @default.
- W2073243337 hasConcept C171250308 @default.
- W2073243337 hasConcept C185592680 @default.
- W2073243337 hasConcept C192562407 @default.
- W2073243337 hasConcept C2779227376 @default.
- W2073243337 hasConcept C43617362 @default.
- W2073243337 hasConcept C49040817 @default.
- W2073243337 hasConcept C544956773 @default.
- W2073243337 hasConcept C57410435 @default.
- W2073243337 hasConcept C8010536 @default.
- W2073243337 hasConceptScore W2073243337C110738630 @default.
- W2073243337 hasConceptScore W2073243337C113196181 @default.
- W2073243337 hasConceptScore W2073243337C171250308 @default.
- W2073243337 hasConceptScore W2073243337C185592680 @default.
- W2073243337 hasConceptScore W2073243337C192562407 @default.
- W2073243337 hasConceptScore W2073243337C2779227376 @default.
- W2073243337 hasConceptScore W2073243337C43617362 @default.
- W2073243337 hasConceptScore W2073243337C49040817 @default.
- W2073243337 hasConceptScore W2073243337C544956773 @default.
- W2073243337 hasConceptScore W2073243337C57410435 @default.
- W2073243337 hasConceptScore W2073243337C8010536 @default.
- W2073243337 hasIssue "1" @default.
- W2073243337 hasLocation W20732433371 @default.
- W2073243337 hasOpenAccess W2073243337 @default.
- W2073243337 hasPrimaryLocation W20732433371 @default.
- W2073243337 hasRelatedWork W2003658924 @default.
- W2073243337 hasRelatedWork W2058504100 @default.
- W2073243337 hasRelatedWork W2061052759 @default.
- W2073243337 hasRelatedWork W2069344615 @default.
- W2073243337 hasRelatedWork W2081942093 @default.
- W2073243337 hasRelatedWork W2082586740 @default.
- W2073243337 hasRelatedWork W2098206083 @default.
- W2073243337 hasRelatedWork W2294544677 @default.
- W2073243337 hasRelatedWork W2312552982 @default.
- W2073243337 hasRelatedWork W2902546961 @default.
- W2073243337 hasVolume "75" @default.
- W2073243337 isParatext "false" @default.
- W2073243337 isRetracted "false" @default.
- W2073243337 magId "2073243337" @default.
- W2073243337 workType "article" @default.