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• W2073253007 startingPage "2143" @default.
• W2073253007 abstract "Radio frequency discharges at 13.56 MHz in CH4(100%), CH4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between Hα and H2(d3Πu→a3Σg+) in H2 at 100 kHz." @default.
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• W2073253007 date "1992-03-01" @default.
• W2073253007 modified "2023-09-26" @default.
• W2073253007 title "Study of the structure of radio frequency glow discharges in CH₄and H₂by spatiotemporal optical emission spectroscopy" @default.
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• W2073253007 doi "https://doi.org/10.1063/1.351137" @default.
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