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- W2073286603 abstract "New etchants, HBr/HF or HBr/CH3COOH, produced sharp etch pits on (100) and (111) slices of InP. The etch pit shape produced on (100) by HBr/HF was pyramidal. The shape on (100) produced by HBr/CH3COOH varied from pyramidal to elongated rectangular along 〈110〉 with increasing the composition ratio of CH3COOH to HBr. The shape produced on (111)B by HBr/HF or HBr/CH3COOH was triangular pyramidal. The etch rates of these new etchants and HBr/H3PO4 were measured as a function of composition ratio at room temperature. The correspondence between pits and dislocations was examined and the results indicated that etch pits produced by these etchants corresponded to dislocations." @default.
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- W2073286603 date "1979-06-01" @default.
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- W2073286603 title "Observation of etch pits produced in InP by new etchants" @default.
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- W2073286603 doi "https://doi.org/10.1016/0022-0248(79)90227-6" @default.
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