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• W2073292704 abstract "We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-μm-diam microdisks." @default.
• W2073292704 created "2016-06-24" @default.
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• W2073292704 date "2004-12-30" @default.
• W2073292704 modified "2023-10-14" @default.
• W2073292704 title "High-Q whispering-gallery modes in GaAs∕AlOx microdisks" @default.
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• W2073292704 doi "https://doi.org/10.1063/1.1844033" @default.
• W2073292704 hasPublicationYear "2004" @default.
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