FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073305087> ?p ?o ?g. }

• W2073305087 abstract "Channeling implantations of 20 keV boron into silicon have been performed with doses between 1013 and 1016 cm−2 in the [100], [110], and [211] direction, and parallel to a (111) plane. Simulations using an empirical electronic stopping model agree very well with the experimental results. The model has been obtained considering a large number of random and channeling implantations published in the literature. It contains a nonlocal and an impact parameter dependent part with the nonlocal fraction increasing with energy. Moreover, a computationally efficient damage accumulation model is presented which takes point defect recombination into account. It is found that due to interactions within a recoil cascade only 1/8 of the generated damage is stable, and that damage saturation takes place at a concentration of 4×1021 cm−3. Comparison of simulations and experiments indicates that displaced atoms reside on random positions rather than on tetrahedral interstitial sites in the silicon lattice." @default.
• W2073305087 created "2016-06-24" @default.
• W2073305087 creator A5031026123 @default.
• W2073305087 creator A5059490768 @default.
• W2073305087 creator A5065937611 @default.
• W2073305087 creator A5085939963 @default.
• W2073305087 creator A5090761260 @default.
• W2073305087 date "1995-04-15" @default.
• W2073305087 modified "2023-09-26" @default.
• W2073305087 title "Boron channeling implantations in silicon: Modeling of electronic stopping and damage accumulation" @default.
• W2073305087 cites W1967532724 @default.
• W2073305087 cites W1973960879 @default.
• W2073305087 cites W1979901267 @default.
• W2073305087 cites W1993575042 @default.
• W2073305087 cites W1997277528 @default.
• W2073305087 cites W2002129150 @default.
• W2073305087 cites W2008804422 @default.
• W2073305087 cites W2017801431 @default.
• W2073305087 cites W2024172140 @default.
• W2073305087 cites W2027045434 @default.
• W2073305087 cites W2028572649 @default.
• W2073305087 cites W2038854930 @default.
• W2073305087 cites W2040365163 @default.
• W2073305087 cites W2048339533 @default.
• W2073305087 cites W2050016127 @default.
• W2073305087 cites W2058411009 @default.
• W2073305087 cites W2059163037 @default.
• W2073305087 cites W2060723647 @default.
• W2073305087 cites W2061040836 @default.
• W2073305087 cites W2078186692 @default.
• W2073305087 cites W2078449894 @default.
• W2073305087 cites W2078996267 @default.
• W2073305087 cites W2089319159 @default.
• W2073305087 cites W2102665688 @default.
• W2073305087 cites W2104796983 @default.
• W2073305087 cites W2151925243 @default.
• W2073305087 cites W2166275163 @default.
• W2073305087 cites W2327036578 @default.
• W2073305087 doi "https://doi.org/10.1063/1.358608" @default.
• W2073305087 hasPublicationYear "1995" @default.
• W2073305087 type Work @default.
• W2073305087 sameAs 2073305087 @default.
• W2073305087 citedByCount "44" @default.
• W2073305087 countsByYear W20733050872014 @default.
• W2073305087 countsByYear W20733050872015 @default.
• W2073305087 countsByYear W20733050872017 @default.
• W2073305087 countsByYear W20733050872020 @default.
• W2073305087 countsByYear W20733050872022 @default.
• W2073305087 countsByYear W20733050872023 @default.
• W2073305087 crossrefType "journal-article" @default.
• W2073305087 hasAuthorship W2073305087A5031026123 @default.
• W2073305087 hasAuthorship W2073305087A5059490768 @default.
• W2073305087 hasAuthorship W2073305087A5065937611 @default.
• W2073305087 hasAuthorship W2073305087A5085939963 @default.
• W2073305087 hasAuthorship W2073305087A5090761260 @default.
• W2073305087 hasConcept C121332964 @default.
• W2073305087 hasConcept C145148216 @default.
• W2073305087 hasConcept C146904657 @default.
• W2073305087 hasConcept C164675345 @default.
• W2073305087 hasConcept C184779094 @default.
• W2073305087 hasConcept C185544564 @default.
• W2073305087 hasConcept C185592680 @default.
• W2073305087 hasConcept C192562407 @default.
• W2073305087 hasConcept C24890656 @default.
• W2073305087 hasConcept C26873012 @default.
• W2073305087 hasConcept C2776668124 @default.
• W2073305087 hasConcept C2781028716 @default.
• W2073305087 hasConcept C2781204021 @default.
• W2073305087 hasConcept C34146451 @default.
• W2073305087 hasConcept C41999313 @default.
• W2073305087 hasConcept C43617362 @default.
• W2073305087 hasConcept C49040817 @default.
• W2073305087 hasConcept C501308230 @default.
• W2073305087 hasConcept C544956773 @default.
• W2073305087 hasConcept C62520636 @default.
• W2073305087 hasConceptScore W2073305087C121332964 @default.
• W2073305087 hasConceptScore W2073305087C145148216 @default.
• W2073305087 hasConceptScore W2073305087C146904657 @default.
• W2073305087 hasConceptScore W2073305087C164675345 @default.
• W2073305087 hasConceptScore W2073305087C184779094 @default.
• W2073305087 hasConceptScore W2073305087C185544564 @default.
• W2073305087 hasConceptScore W2073305087C185592680 @default.
• W2073305087 hasConceptScore W2073305087C192562407 @default.
• W2073305087 hasConceptScore W2073305087C24890656 @default.
• W2073305087 hasConceptScore W2073305087C26873012 @default.
• W2073305087 hasConceptScore W2073305087C2776668124 @default.
• W2073305087 hasConceptScore W2073305087C2781028716 @default.
• W2073305087 hasConceptScore W2073305087C2781204021 @default.
• W2073305087 hasConceptScore W2073305087C34146451 @default.
• W2073305087 hasConceptScore W2073305087C41999313 @default.
• W2073305087 hasConceptScore W2073305087C43617362 @default.
• W2073305087 hasConceptScore W2073305087C49040817 @default.
• W2073305087 hasConceptScore W2073305087C501308230 @default.
• W2073305087 hasConceptScore W2073305087C544956773 @default.
• W2073305087 hasConceptScore W2073305087C62520636 @default.
• W2073305087 hasLocation W20733050871 @default.
• W2073305087 hasOpenAccess W2073305087 @default.
• W2073305087 hasPrimaryLocation W20733050871 @default.
• W2073305087 hasRelatedWork W1979901267 @default.
• W2073305087 hasRelatedWork W1985463741 @default.

• next