Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073319997> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2073319997 abstract "Conventional acetal based, chemically amplified DUV photoresists are known to yield unacceptable shrinkage after exposure due to volatile nature of the byproducts generated after acid catalysis at room temperature. This paper mainly demonstrates that all acetal based resists do not produce the same extent of shrinkage. Higher boiling vinyl ether acetal (HBVEA) polymers can potentially be used to completely minimize the shrinkage (< 0.6%) and this value is independent of the blocking levels of the polymer. Dissolution rate in the exposed areas are found to be relatively greater for HBVEA polymers when compared to low boiling vinyl ether acetal polymers under identical conditions. Observed less shrinkage and higher dissolution rate values are attributed to the non-volatile nature of the alcohol generated in the film after photo-acid induced deprotection reaction. HBVEA polymers are demonstrated to resolve 175 nm lines/spaces using 0.53 NA stepper." @default.
- W2073319997 created "2016-06-24" @default.
- W2073319997 creator A5012233229 @default.
- W2073319997 creator A5072829967 @default.
- W2073319997 creator A5074882900 @default.
- W2073319997 creator A5076442579 @default.
- W2073319997 creator A5082127558 @default.
- W2073319997 date "1998-06-29" @default.
- W2073319997 modified "2023-09-23" @default.
- W2073319997 title "Advanced ARCH resist" @default.
- W2073319997 doi "https://doi.org/10.1117/12.312368" @default.
- W2073319997 hasPublicationYear "1998" @default.
- W2073319997 type Work @default.
- W2073319997 sameAs 2073319997 @default.
- W2073319997 citedByCount "0" @default.
- W2073319997 crossrefType "proceedings-article" @default.
- W2073319997 hasAuthorship W2073319997A5012233229 @default.
- W2073319997 hasAuthorship W2073319997A5072829967 @default.
- W2073319997 hasAuthorship W2073319997A5074882900 @default.
- W2073319997 hasAuthorship W2073319997A5076442579 @default.
- W2073319997 hasAuthorship W2073319997A5082127558 @default.
- W2073319997 hasConcept C127413603 @default.
- W2073319997 hasConcept C134121241 @default.
- W2073319997 hasConcept C157777378 @default.
- W2073319997 hasConcept C159985019 @default.
- W2073319997 hasConcept C161790260 @default.
- W2073319997 hasConcept C178790620 @default.
- W2073319997 hasConcept C180145272 @default.
- W2073319997 hasConcept C185592680 @default.
- W2073319997 hasConcept C188027245 @default.
- W2073319997 hasConcept C188596812 @default.
- W2073319997 hasConcept C192562407 @default.
- W2073319997 hasConcept C2777731525 @default.
- W2073319997 hasConcept C2779227376 @default.
- W2073319997 hasConcept C2780407432 @default.
- W2073319997 hasConcept C42360764 @default.
- W2073319997 hasConcept C521977710 @default.
- W2073319997 hasConcept C53524968 @default.
- W2073319997 hasConcept C88380143 @default.
- W2073319997 hasConceptScore W2073319997C127413603 @default.
- W2073319997 hasConceptScore W2073319997C134121241 @default.
- W2073319997 hasConceptScore W2073319997C157777378 @default.
- W2073319997 hasConceptScore W2073319997C159985019 @default.
- W2073319997 hasConceptScore W2073319997C161790260 @default.
- W2073319997 hasConceptScore W2073319997C178790620 @default.
- W2073319997 hasConceptScore W2073319997C180145272 @default.
- W2073319997 hasConceptScore W2073319997C185592680 @default.
- W2073319997 hasConceptScore W2073319997C188027245 @default.
- W2073319997 hasConceptScore W2073319997C188596812 @default.
- W2073319997 hasConceptScore W2073319997C192562407 @default.
- W2073319997 hasConceptScore W2073319997C2777731525 @default.
- W2073319997 hasConceptScore W2073319997C2779227376 @default.
- W2073319997 hasConceptScore W2073319997C2780407432 @default.
- W2073319997 hasConceptScore W2073319997C42360764 @default.
- W2073319997 hasConceptScore W2073319997C521977710 @default.
- W2073319997 hasConceptScore W2073319997C53524968 @default.
- W2073319997 hasConceptScore W2073319997C88380143 @default.
- W2073319997 hasLocation W20733199971 @default.
- W2073319997 hasOpenAccess W2073319997 @default.
- W2073319997 hasPrimaryLocation W20733199971 @default.
- W2073319997 hasRelatedWork W1964220853 @default.
- W2073319997 hasRelatedWork W1966604088 @default.
- W2073319997 hasRelatedWork W1974226229 @default.
- W2073319997 hasRelatedWork W1974539202 @default.
- W2073319997 hasRelatedWork W1975151438 @default.
- W2073319997 hasRelatedWork W1983484935 @default.
- W2073319997 hasRelatedWork W1994650814 @default.
- W2073319997 hasRelatedWork W1998669208 @default.
- W2073319997 hasRelatedWork W1998929899 @default.
- W2073319997 hasRelatedWork W2008726015 @default.
- W2073319997 hasRelatedWork W2009135057 @default.
- W2073319997 hasRelatedWork W2017639790 @default.
- W2073319997 hasRelatedWork W2018283098 @default.
- W2073319997 hasRelatedWork W2025696789 @default.
- W2073319997 hasRelatedWork W2034744792 @default.
- W2073319997 hasRelatedWork W2049457740 @default.
- W2073319997 hasRelatedWork W2053879754 @default.
- W2073319997 hasRelatedWork W2056988943 @default.
- W2073319997 hasRelatedWork W2073475065 @default.
- W2073319997 hasRelatedWork W2156747378 @default.
- W2073319997 isParatext "false" @default.
- W2073319997 isRetracted "false" @default.
- W2073319997 magId "2073319997" @default.
- W2073319997 workType "article" @default.