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- W2073396204 endingPage "3231" @default.
- W2073396204 startingPage "3227" @default.
- W2073396204 abstract "In this paper we discuss the surface roughness tolerances for mirrors used in synchrotron x-ray lithography beamlines. These requirements are different for lithography beamlines than they are for traditional beamlines, which are imaging systems. For imaging optical systems it is desirable to minimize the surface roughness of the mirror in order to reduce the intensity of the scattered light. Proximity print x-ray lithography requires nonimaging optical systems designed to deliver a uniform power distribution at the exposure field. In such applications, the scattering of x rays is less important, provided that the total flux is not too severely degraded. From this point of view it is important to notice that scattering removes power from the central, coherent, beam and redistributes it over a wider angle. The loss in reflectivity is only apparent because energy is conserved in the process. Furthermore, the presence of scattered x rays can be used to improve the uniformity of the power distribution. The requirement on the surface quality of mirrors used for scanning x-ray illumination is thus relaxed with respect to that of typical imaging systems, providing considerable cost savings and simplifying manufacturing. The effect of the scattered light on the uniformity of illumination is dependent on intensity and angular distribution of the scattering. Experimental results will be compared to the results predicted by calculations." @default.
- W2073396204 created "2016-06-24" @default.
- W2073396204 creator A5079741182 @default.
- W2073396204 date "1991-11-01" @default.
- W2073396204 modified "2023-09-27" @default.
- W2073396204 title "Effects of mirror surface roughness on exposure field uniformity in synchrotron x-ray lithography" @default.
- W2073396204 doi "https://doi.org/10.1116/1.585292" @default.
- W2073396204 hasPublicationYear "1991" @default.
- W2073396204 type Work @default.
- W2073396204 sameAs 2073396204 @default.
- W2073396204 citedByCount "4" @default.
- W2073396204 crossrefType "journal-article" @default.
- W2073396204 hasAuthorship W2073396204A5079741182 @default.
- W2073396204 hasConcept C107365816 @default.
- W2073396204 hasConcept C120665830 @default.
- W2073396204 hasConcept C121332964 @default.
- W2073396204 hasConcept C150627866 @default.
- W2073396204 hasConcept C159985019 @default.
- W2073396204 hasConcept C162996421 @default.
- W2073396204 hasConcept C171250308 @default.
- W2073396204 hasConcept C191486275 @default.
- W2073396204 hasConcept C192562407 @default.
- W2073396204 hasConcept C204223013 @default.
- W2073396204 hasConcept C21368211 @default.
- W2073396204 hasConcept C2779227376 @default.
- W2073396204 hasConcept C2779328170 @default.
- W2073396204 hasConcept C35655370 @default.
- W2073396204 hasConcept C41794268 @default.
- W2073396204 hasConcept C53524968 @default.
- W2073396204 hasConcept C71039073 @default.
- W2073396204 hasConceptScore W2073396204C107365816 @default.
- W2073396204 hasConceptScore W2073396204C120665830 @default.
- W2073396204 hasConceptScore W2073396204C121332964 @default.
- W2073396204 hasConceptScore W2073396204C150627866 @default.
- W2073396204 hasConceptScore W2073396204C159985019 @default.
- W2073396204 hasConceptScore W2073396204C162996421 @default.
- W2073396204 hasConceptScore W2073396204C171250308 @default.
- W2073396204 hasConceptScore W2073396204C191486275 @default.
- W2073396204 hasConceptScore W2073396204C192562407 @default.
- W2073396204 hasConceptScore W2073396204C204223013 @default.
- W2073396204 hasConceptScore W2073396204C21368211 @default.
- W2073396204 hasConceptScore W2073396204C2779227376 @default.
- W2073396204 hasConceptScore W2073396204C2779328170 @default.
- W2073396204 hasConceptScore W2073396204C35655370 @default.
- W2073396204 hasConceptScore W2073396204C41794268 @default.
- W2073396204 hasConceptScore W2073396204C53524968 @default.
- W2073396204 hasConceptScore W2073396204C71039073 @default.
- W2073396204 hasIssue "6" @default.
- W2073396204 hasLocation W20733962041 @default.
- W2073396204 hasOpenAccess W2073396204 @default.
- W2073396204 hasPrimaryLocation W20733962041 @default.
- W2073396204 hasRelatedWork W2003172286 @default.
- W2073396204 hasRelatedWork W2008378699 @default.
- W2073396204 hasRelatedWork W2062587467 @default.
- W2073396204 hasRelatedWork W2084200994 @default.
- W2073396204 hasRelatedWork W2544120403 @default.
- W2073396204 hasRelatedWork W2546756142 @default.
- W2073396204 hasRelatedWork W3132460757 @default.
- W2073396204 hasRelatedWork W3204062534 @default.
- W2073396204 hasRelatedWork W3217727668 @default.
- W2073396204 hasRelatedWork W4281559086 @default.
- W2073396204 hasVolume "9" @default.
- W2073396204 isParatext "false" @default.
- W2073396204 isRetracted "false" @default.
- W2073396204 magId "2073396204" @default.
- W2073396204 workType "article" @default.