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- W2073399499 abstract "193nm immersion lithography has recently gained a lot of momentum, and is currently anticipated to be the prime lithography solution for the 65nm and 45nm half pitch technology nodes. In this paper, the latest achievements obtained in the IMEC immersion program are reviewed. Also the remaining concerns are addressed. Items touched upon are: lithographic performance of the full field scanner, defectivity including bubbles, resist and top coat progress and polarization effects." @default.
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- W2073399499 date "2005-01-01" @default.
- W2073399499 modified "2023-10-03" @default.
- W2073399499 title "Progress in ArF immersion lithography" @default.
- W2073399499 doi "https://doi.org/10.1109/imnc.2005.203733" @default.
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