Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073403958> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2073403958 endingPage "201" @default.
- W2073403958 startingPage "199" @default.
- W2073403958 abstract "Aluminum nitride films were synthesized by electron gun evaporation of aluminum on to Si (111) wafer with simultaneous bombardment by nitrogen ions. Under special conditions, polycrystalline AlN films of fine crystallinity were obtained." @default.
- W2073403958 created "2016-06-24" @default.
- W2073403958 creator A5019994767 @default.
- W2073403958 creator A5036063421 @default.
- W2073403958 creator A5037670737 @default.
- W2073403958 creator A5060464053 @default.
- W2073403958 date "1997-11-01" @default.
- W2073403958 modified "2023-10-16" @default.
- W2073403958 title "Materials science communication formation of aln films by al evaporation with nitrogen ion beam bombardment" @default.
- W2073403958 cites W1977325636 @default.
- W2073403958 cites W1978819423 @default.
- W2073403958 cites W1998360365 @default.
- W2073403958 cites W2017268449 @default.
- W2073403958 cites W2039009186 @default.
- W2073403958 cites W2054772942 @default.
- W2073403958 cites W2074275602 @default.
- W2073403958 cites W2179965569 @default.
- W2073403958 cites W2007958473 @default.
- W2073403958 doi "https://doi.org/10.1016/s0254-0584(97)80295-7" @default.
- W2073403958 hasPublicationYear "1997" @default.
- W2073403958 type Work @default.
- W2073403958 sameAs 2073403958 @default.
- W2073403958 citedByCount "19" @default.
- W2073403958 countsByYear W20734039582020 @default.
- W2073403958 crossrefType "journal-article" @default.
- W2073403958 hasAuthorship W2073403958A5019994767 @default.
- W2073403958 hasAuthorship W2073403958A5036063421 @default.
- W2073403958 hasAuthorship W2073403958A5037670737 @default.
- W2073403958 hasAuthorship W2073403958A5060464053 @default.
- W2073403958 hasConcept C121332964 @default.
- W2073403958 hasConcept C137637335 @default.
- W2073403958 hasConcept C145148216 @default.
- W2073403958 hasConcept C159985019 @default.
- W2073403958 hasConcept C160671074 @default.
- W2073403958 hasConcept C171250308 @default.
- W2073403958 hasConcept C178790620 @default.
- W2073403958 hasConcept C185592680 @default.
- W2073403958 hasConcept C19067145 @default.
- W2073403958 hasConcept C191897082 @default.
- W2073403958 hasConcept C192562407 @default.
- W2073403958 hasConcept C194760766 @default.
- W2073403958 hasConcept C2779227376 @default.
- W2073403958 hasConcept C2781463530 @default.
- W2073403958 hasConcept C46275449 @default.
- W2073403958 hasConcept C50774322 @default.
- W2073403958 hasConcept C513153333 @default.
- W2073403958 hasConcept C537208039 @default.
- W2073403958 hasConcept C61441594 @default.
- W2073403958 hasConcept C7770020 @default.
- W2073403958 hasConcept C97355855 @default.
- W2073403958 hasConceptScore W2073403958C121332964 @default.
- W2073403958 hasConceptScore W2073403958C137637335 @default.
- W2073403958 hasConceptScore W2073403958C145148216 @default.
- W2073403958 hasConceptScore W2073403958C159985019 @default.
- W2073403958 hasConceptScore W2073403958C160671074 @default.
- W2073403958 hasConceptScore W2073403958C171250308 @default.
- W2073403958 hasConceptScore W2073403958C178790620 @default.
- W2073403958 hasConceptScore W2073403958C185592680 @default.
- W2073403958 hasConceptScore W2073403958C19067145 @default.
- W2073403958 hasConceptScore W2073403958C191897082 @default.
- W2073403958 hasConceptScore W2073403958C192562407 @default.
- W2073403958 hasConceptScore W2073403958C194760766 @default.
- W2073403958 hasConceptScore W2073403958C2779227376 @default.
- W2073403958 hasConceptScore W2073403958C2781463530 @default.
- W2073403958 hasConceptScore W2073403958C46275449 @default.
- W2073403958 hasConceptScore W2073403958C50774322 @default.
- W2073403958 hasConceptScore W2073403958C513153333 @default.
- W2073403958 hasConceptScore W2073403958C537208039 @default.
- W2073403958 hasConceptScore W2073403958C61441594 @default.
- W2073403958 hasConceptScore W2073403958C7770020 @default.
- W2073403958 hasConceptScore W2073403958C97355855 @default.
- W2073403958 hasIssue "2" @default.
- W2073403958 hasLocation W20734039581 @default.
- W2073403958 hasOpenAccess W2073403958 @default.
- W2073403958 hasPrimaryLocation W20734039581 @default.
- W2073403958 hasRelatedWork W2008612727 @default.
- W2073403958 hasRelatedWork W2033176073 @default.
- W2073403958 hasRelatedWork W2047732162 @default.
- W2073403958 hasRelatedWork W2073403958 @default.
- W2073403958 hasRelatedWork W2074855887 @default.
- W2073403958 hasRelatedWork W2136932489 @default.
- W2073403958 hasRelatedWork W2375648871 @default.
- W2073403958 hasRelatedWork W2474642425 @default.
- W2073403958 hasRelatedWork W2520884072 @default.
- W2073403958 hasRelatedWork W2132219547 @default.
- W2073403958 hasVolume "51" @default.
- W2073403958 isParatext "false" @default.
- W2073403958 isRetracted "false" @default.
- W2073403958 magId "2073403958" @default.
- W2073403958 workType "article" @default.