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- W2073498428 abstract "A reactive ion-beam etching technique using freon gas is developed for microfabrication in SiC. The enhancement of the etching rate of SiC is apparent by admixing O 2 gas in CF 4 gas. The etching rate of SiC for CF 4 +O 2 (40%) gas is about 2 times larger than that for Ar gas. This technique appears to be very useful for producing various devices of SiC." @default.
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- W2073498428 date "1981-01-01" @default.
- W2073498428 modified "2023-09-24" @default.
- W2073498428 title "Reactive Ion-Beam Etching of Silicon Carbide" @default.
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- W2073498428 doi "https://doi.org/10.1143/jjap.20.l38" @default.
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