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- W2073500900 abstract "This paper will discuss a new universal format for representing the pattern data and other information which define integrated circuits and the process of making them. The format, and the applications to be built around it, are designed to greatly save in cost, reduce production time, eliminate errors, and simplify procedures. It is called a `universal' format because the pattern data for a mask or a wafer can be encoded independently of the method of manufacturing it, and all tools can access the same data file without data conversion. The format encompasses all aspects of production, including mask layout, critical dimensions, e- beam and optical stepper proximity corrections, phase shift masks, and overlap removal. This paper discusses technology for connecting the universal format data in real time to high-speed tools for lithography (both raster and shaped beam technologies) and inspection." @default.
- W2073500900 created "2016-06-24" @default.
- W2073500900 creator A5045897871 @default.
- W2073500900 date "1994-02-15" @default.
- W2073500900 modified "2023-09-23" @default.
- W2073500900 title "<title>Universal pattern data format</title>" @default.
- W2073500900 doi "https://doi.org/10.1117/12.167270" @default.
- W2073500900 hasPublicationYear "1994" @default.
- W2073500900 type Work @default.
- W2073500900 sameAs 2073500900 @default.
- W2073500900 citedByCount "0" @default.
- W2073500900 crossrefType "proceedings-article" @default.
- W2073500900 hasAuthorship W2073500900A5045897871 @default.
- W2073500900 hasConcept C111919701 @default.
- W2073500900 hasConcept C120665830 @default.
- W2073500900 hasConcept C121332964 @default.
- W2073500900 hasConcept C121684516 @default.
- W2073500900 hasConcept C1232282 @default.
- W2073500900 hasConcept C127413603 @default.
- W2073500900 hasConcept C181844469 @default.
- W2073500900 hasConcept C187504802 @default.
- W2073500900 hasConcept C199639397 @default.
- W2073500900 hasConcept C204223013 @default.
- W2073500900 hasConcept C41008148 @default.
- W2073500900 hasConcept C77088390 @default.
- W2073500900 hasConcept C78371743 @default.
- W2073500900 hasConcept C9390403 @default.
- W2073500900 hasConcept C97250363 @default.
- W2073500900 hasConcept C98045186 @default.
- W2073500900 hasConceptScore W2073500900C111919701 @default.
- W2073500900 hasConceptScore W2073500900C120665830 @default.
- W2073500900 hasConceptScore W2073500900C121332964 @default.
- W2073500900 hasConceptScore W2073500900C121684516 @default.
- W2073500900 hasConceptScore W2073500900C1232282 @default.
- W2073500900 hasConceptScore W2073500900C127413603 @default.
- W2073500900 hasConceptScore W2073500900C181844469 @default.
- W2073500900 hasConceptScore W2073500900C187504802 @default.
- W2073500900 hasConceptScore W2073500900C199639397 @default.
- W2073500900 hasConceptScore W2073500900C204223013 @default.
- W2073500900 hasConceptScore W2073500900C41008148 @default.
- W2073500900 hasConceptScore W2073500900C77088390 @default.
- W2073500900 hasConceptScore W2073500900C78371743 @default.
- W2073500900 hasConceptScore W2073500900C9390403 @default.
- W2073500900 hasConceptScore W2073500900C97250363 @default.
- W2073500900 hasConceptScore W2073500900C98045186 @default.
- W2073500900 hasLocation W20735009001 @default.
- W2073500900 hasOpenAccess W2073500900 @default.
- W2073500900 hasPrimaryLocation W20735009001 @default.
- W2073500900 hasRelatedWork W1968817737 @default.
- W2073500900 hasRelatedWork W1976739984 @default.
- W2073500900 hasRelatedWork W1976886430 @default.
- W2073500900 hasRelatedWork W1986705012 @default.
- W2073500900 hasRelatedWork W2013594656 @default.
- W2073500900 hasRelatedWork W2026550030 @default.
- W2073500900 hasRelatedWork W2050251653 @default.
- W2073500900 hasRelatedWork W2074870341 @default.
- W2073500900 hasRelatedWork W2076758759 @default.
- W2073500900 hasRelatedWork W2128294987 @default.
- W2073500900 isParatext "false" @default.
- W2073500900 isRetracted "false" @default.
- W2073500900 magId "2073500900" @default.
- W2073500900 workType "article" @default.