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• W2073526287 abstract "Purpose – The development of chemical sensors based on nanostructures, such as nanotubes or nanowires, depends on the capability to reproducibly control the processing of the sensor. Alignment and consistent electrical contact of nanostructures on a microsensor platform is challenging. This can be accomplished using labor‐intensive approaches, specialized processing technology, or growth of nanostructures in situ. However, the use of standard microfabrication techniques for fabricating nanostructured microsensors is problematic. The purpose of this paper is to address this challenge using standard photoresist processing combined with dielectrophoresis." @default.
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• W2073526287 date "2012-03-23" @default.
• W2073526287 modified "2023-09-26" @default.
• W2073526287 title "Nanostructured material sensor processing using microfabrication techniques" @default.
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• W2073526287 doi "https://doi.org/10.1108/02602281211209392" @default.
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