Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073605864> ?p ?o ?g. }
- W2073605864 abstract "We have grown AlxGa1−xN/GaN (0 < x < 0.2) films by MOVPE at atmospheric pressure in a home-made vertical reactor. The films were deposited on high temperature GaN templates which were grown on in situ nano-masked (0 0 0 1) sapphire substrates by using Si/N treatment. This process presents advantages of ELO technology without its ex situ complicated steps and induces a transition from 3D mode (initial stage) to 2D growth mode. We investigate systematically the effect of the template thickness and morphology on structural and morphological properties of AlGaN films. Four 0.5 μm-thick Al0.07Ga0.93N samples grown on different GaN templates have been studied. The HRXD and the AFM results show a better film quality when the AlGaN layer is grown on a 1.3 μm-thick 2D GaN template. It is possible to control the stress in the layers. The crystalline quality is also showed to degrade with Al solid content increase." @default.
- W2073605864 created "2016-06-24" @default.
- W2073605864 creator A5007775892 @default.
- W2073605864 creator A5054664986 @default.
- W2073605864 creator A5063930536 @default.
- W2073605864 creator A5074130720 @default.
- W2073605864 creator A5078237350 @default.
- W2073605864 date "2013-09-01" @default.
- W2073605864 modified "2023-09-25" @default.
- W2073605864 title "Effect of GaN template thickness and morphology on AlxGa1−xN (0<x<0.2) growth by MOVPE" @default.
- W2073605864 cites W1514291166 @default.
- W2073605864 cites W1969068887 @default.
- W2073605864 cites W1970446620 @default.
- W2073605864 cites W1971675780 @default.
- W2073605864 cites W1978317306 @default.
- W2073605864 cites W2000251801 @default.
- W2073605864 cites W2002839639 @default.
- W2073605864 cites W2003550854 @default.
- W2073605864 cites W2005977088 @default.
- W2073605864 cites W2008249871 @default.
- W2073605864 cites W2009182969 @default.
- W2073605864 cites W2018750909 @default.
- W2073605864 cites W2024006703 @default.
- W2073605864 cites W2032328069 @default.
- W2073605864 cites W2032775803 @default.
- W2073605864 cites W2062369313 @default.
- W2073605864 cites W2066084033 @default.
- W2073605864 cites W2067439400 @default.
- W2073605864 cites W2067457916 @default.
- W2073605864 cites W2070934175 @default.
- W2073605864 cites W2078214946 @default.
- W2073605864 cites W2088937471 @default.
- W2073605864 cites W2099912040 @default.
- W2073605864 cites W2106347062 @default.
- W2073605864 cites W2122177335 @default.
- W2073605864 cites W2031577852 @default.
- W2073605864 doi "https://doi.org/10.1016/j.apsusc.2013.05.040" @default.
- W2073605864 hasPublicationYear "2013" @default.
- W2073605864 type Work @default.
- W2073605864 sameAs 2073605864 @default.
- W2073605864 citedByCount "3" @default.
- W2073605864 countsByYear W20736058642015 @default.
- W2073605864 countsByYear W20736058642016 @default.
- W2073605864 countsByYear W20736058642019 @default.
- W2073605864 crossrefType "journal-article" @default.
- W2073605864 hasAuthorship W2073605864A5007775892 @default.
- W2073605864 hasAuthorship W2073605864A5054664986 @default.
- W2073605864 hasAuthorship W2073605864A5063930536 @default.
- W2073605864 hasAuthorship W2073605864A5074130720 @default.
- W2073605864 hasAuthorship W2073605864A5078237350 @default.
- W2073605864 hasConcept C110738630 @default.
- W2073605864 hasConcept C120665830 @default.
- W2073605864 hasConcept C121332964 @default.
- W2073605864 hasConcept C127413603 @default.
- W2073605864 hasConcept C171250308 @default.
- W2073605864 hasConcept C175665537 @default.
- W2073605864 hasConcept C178790620 @default.
- W2073605864 hasConcept C185592680 @default.
- W2073605864 hasConcept C192562407 @default.
- W2073605864 hasConcept C2777822432 @default.
- W2073605864 hasConcept C2779227376 @default.
- W2073605864 hasConcept C2780064504 @default.
- W2073605864 hasConcept C42360764 @default.
- W2073605864 hasConcept C49040817 @default.
- W2073605864 hasConcept C499950583 @default.
- W2073605864 hasConcept C520434653 @default.
- W2073605864 hasConcept C54355233 @default.
- W2073605864 hasConcept C57410435 @default.
- W2073605864 hasConcept C82714645 @default.
- W2073605864 hasConcept C86803240 @default.
- W2073605864 hasConceptScore W2073605864C110738630 @default.
- W2073605864 hasConceptScore W2073605864C120665830 @default.
- W2073605864 hasConceptScore W2073605864C121332964 @default.
- W2073605864 hasConceptScore W2073605864C127413603 @default.
- W2073605864 hasConceptScore W2073605864C171250308 @default.
- W2073605864 hasConceptScore W2073605864C175665537 @default.
- W2073605864 hasConceptScore W2073605864C178790620 @default.
- W2073605864 hasConceptScore W2073605864C185592680 @default.
- W2073605864 hasConceptScore W2073605864C192562407 @default.
- W2073605864 hasConceptScore W2073605864C2777822432 @default.
- W2073605864 hasConceptScore W2073605864C2779227376 @default.
- W2073605864 hasConceptScore W2073605864C2780064504 @default.
- W2073605864 hasConceptScore W2073605864C42360764 @default.
- W2073605864 hasConceptScore W2073605864C49040817 @default.
- W2073605864 hasConceptScore W2073605864C499950583 @default.
- W2073605864 hasConceptScore W2073605864C520434653 @default.
- W2073605864 hasConceptScore W2073605864C54355233 @default.
- W2073605864 hasConceptScore W2073605864C57410435 @default.
- W2073605864 hasConceptScore W2073605864C82714645 @default.
- W2073605864 hasConceptScore W2073605864C86803240 @default.
- W2073605864 hasLocation W20736058641 @default.
- W2073605864 hasOpenAccess W2073605864 @default.
- W2073605864 hasPrimaryLocation W20736058641 @default.
- W2073605864 hasRelatedWork W1965136299 @default.
- W2073605864 hasRelatedWork W1974253354 @default.
- W2073605864 hasRelatedWork W1984573232 @default.
- W2073605864 hasRelatedWork W2012720839 @default.
- W2073605864 hasRelatedWork W2028728996 @default.
- W2073605864 hasRelatedWork W2072161032 @default.
- W2073605864 hasRelatedWork W2079238520 @default.