Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073624513> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2073624513 abstract "Pulsed laser deposition (PLD), which provides very unique features compared to the conventional physical vapor deposition technique such as sputtering, is one of the most powerful techniques to deposit conductive oxide thin films. Over the past several years, we have optimized the processing conditions to deposit high quality conductive RuO<SUB>2</SUB> and SrRuO<SUB>3</SUB> thin films by PLD. We show that the substrate temperature during the deposition process plays an important role in determining the structural and electrical properties of these films. Epitaxial RuO<SUB>2</SUB> and SrRuO<SUB>3</SUB> thin films with a room-temperature resistivity of 35 (mu) (Omega) -cm and 280 (mu) (omega) -cm, respectively, have been successfully deposited by PLD." @default.
- W2073624513 created "2016-06-24" @default.
- W2073624513 creator A5010405864 @default.
- W2073624513 date "1998-09-14" @default.
- W2073624513 modified "2023-09-23" @default.
- W2073624513 title "<title>Pulsed laser deposition of metal oxide films</title>" @default.
- W2073624513 doi "https://doi.org/10.1117/12.321615" @default.
- W2073624513 hasPublicationYear "1998" @default.
- W2073624513 type Work @default.
- W2073624513 sameAs 2073624513 @default.
- W2073624513 citedByCount "0" @default.
- W2073624513 crossrefType "proceedings-article" @default.
- W2073624513 hasAuthorship W2073624513A5010405864 @default.
- W2073624513 hasConcept C110738630 @default.
- W2073624513 hasConcept C111368507 @default.
- W2073624513 hasConcept C113196181 @default.
- W2073624513 hasConcept C119599485 @default.
- W2073624513 hasConcept C127313418 @default.
- W2073624513 hasConcept C127413603 @default.
- W2073624513 hasConcept C151730666 @default.
- W2073624513 hasConcept C171250308 @default.
- W2073624513 hasConcept C185592680 @default.
- W2073624513 hasConcept C19067145 @default.
- W2073624513 hasConcept C191897082 @default.
- W2073624513 hasConcept C192562407 @default.
- W2073624513 hasConcept C22423302 @default.
- W2073624513 hasConcept C2777289219 @default.
- W2073624513 hasConcept C2779227376 @default.
- W2073624513 hasConcept C2779851234 @default.
- W2073624513 hasConcept C2816523 @default.
- W2073624513 hasConcept C37982897 @default.
- W2073624513 hasConcept C43617362 @default.
- W2073624513 hasConcept C49040817 @default.
- W2073624513 hasConcept C51576277 @default.
- W2073624513 hasConcept C57410435 @default.
- W2073624513 hasConcept C64297162 @default.
- W2073624513 hasConcept C69990965 @default.
- W2073624513 hasConcept C86803240 @default.
- W2073624513 hasConceptScore W2073624513C110738630 @default.
- W2073624513 hasConceptScore W2073624513C111368507 @default.
- W2073624513 hasConceptScore W2073624513C113196181 @default.
- W2073624513 hasConceptScore W2073624513C119599485 @default.
- W2073624513 hasConceptScore W2073624513C127313418 @default.
- W2073624513 hasConceptScore W2073624513C127413603 @default.
- W2073624513 hasConceptScore W2073624513C151730666 @default.
- W2073624513 hasConceptScore W2073624513C171250308 @default.
- W2073624513 hasConceptScore W2073624513C185592680 @default.
- W2073624513 hasConceptScore W2073624513C19067145 @default.
- W2073624513 hasConceptScore W2073624513C191897082 @default.
- W2073624513 hasConceptScore W2073624513C192562407 @default.
- W2073624513 hasConceptScore W2073624513C22423302 @default.
- W2073624513 hasConceptScore W2073624513C2777289219 @default.
- W2073624513 hasConceptScore W2073624513C2779227376 @default.
- W2073624513 hasConceptScore W2073624513C2779851234 @default.
- W2073624513 hasConceptScore W2073624513C2816523 @default.
- W2073624513 hasConceptScore W2073624513C37982897 @default.
- W2073624513 hasConceptScore W2073624513C43617362 @default.
- W2073624513 hasConceptScore W2073624513C49040817 @default.
- W2073624513 hasConceptScore W2073624513C51576277 @default.
- W2073624513 hasConceptScore W2073624513C57410435 @default.
- W2073624513 hasConceptScore W2073624513C64297162 @default.
- W2073624513 hasConceptScore W2073624513C69990965 @default.
- W2073624513 hasConceptScore W2073624513C86803240 @default.
- W2073624513 hasLocation W20736245131 @default.
- W2073624513 hasOpenAccess W2073624513 @default.
- W2073624513 hasPrimaryLocation W20736245131 @default.
- W2073624513 hasRelatedWork W1779249657 @default.
- W2073624513 hasRelatedWork W1982961847 @default.
- W2073624513 hasRelatedWork W2030970608 @default.
- W2073624513 hasRelatedWork W2081874730 @default.
- W2073624513 hasRelatedWork W222955565 @default.
- W2073624513 hasRelatedWork W2242237644 @default.
- W2073624513 hasRelatedWork W2314731314 @default.
- W2073624513 hasRelatedWork W2388498853 @default.
- W2073624513 hasRelatedWork W2897487435 @default.
- W2073624513 hasRelatedWork W3177905752 @default.
- W2073624513 isParatext "false" @default.
- W2073624513 isRetracted "false" @default.
- W2073624513 magId "2073624513" @default.
- W2073624513 workType "article" @default.