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- W2073636020 abstract "Various mechanisms for the Fermi level pinning of p-gate metals on HfO2 are analyzed in detail. It is found that for Fermi energies below the Si valence band, HfO2 can oxidize Si by creating positively charged O vacancies. The band bending due to this vacancy concentration can account for the observed Fermi level pinning of p metals on HfO2." @default.
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- W2073636020 date "2007-09-24" @default.
- W2073636020 modified "2023-09-23" @default.
- W2073636020 title "Fermi level pinning by defects in HfO2-metal gate stacks" @default.
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- W2073636020 doi "https://doi.org/10.1063/1.2790479" @default.
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