FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073655848> ?p ?o ?g. }

• W2073655848 endingPage "09MF13" @default.
• W2073655848 startingPage "09MF13" @default.
• W2073655848 abstract "Nanoscale-thick high- k ZrO 2 films were fabricated via sol–gel method and the effects of heating time and an intermediate heat treatment on the microstructure and dielectric properties were studied. One set of films was spin-coated with a thickness of ∼13 nm on Si substrates by two consecutive coating and drying sequences, followed by heating at 500 °C for 1, 5, or 10 h, while another sample was prepared by heating at 500 °C for 1 h after each drying step (intermediate heated sample). As the heating time was extended, the permittivity increased, but the leakage current property degraded. In contrast, both the permittivity and leakage current property were enhanced in the case of the intermediate heated sample. These improvements were likely due to the effective elimination of remnant organics and the development of a two-layer morphology consisting of lower amorphous and upper crystalline layers, the formation of which occurred via the minimization of surface and strain energies." @default.
• W2073655848 created "2016-06-24" @default.
• W2073655848 creator A5013123379 @default.
• W2073655848 creator A5019132282 @default.
• W2073655848 creator A5028907255 @default.
• W2073655848 creator A5046420181 @default.
• W2073655848 creator A5053829893 @default.
• W2073655848 creator A5075301361 @default.
• W2073655848 creator A5077895127 @default.
• W2073655848 date "2012-09-01" @default.
• W2073655848 modified "2023-10-18" @default.
• W2073655848 title "Effects of Heating Time and Intermediate Heating on Sol–Gel-Processed ZrO₂ Thin Films" @default.
• W2073655848 cites W1572253984 @default.
• W2073655848 cites W1612643757 @default.
• W2073655848 cites W1626189967 @default.
• W2073655848 cites W1967724257 @default.
• W2073655848 cites W1968406658 @default.
• W2073655848 cites W1980518634 @default.
• W2073655848 cites W1982682451 @default.
• W2073655848 cites W2003645630 @default.
• W2073655848 cites W2010524649 @default.
• W2073655848 cites W2015388638 @default.
• W2073655848 cites W2017694301 @default.
• W2073655848 cites W2019645318 @default.
• W2073655848 cites W2046042793 @default.
• W2073655848 cites W2046720803 @default.
• W2073655848 cites W2047421103 @default.
• W2073655848 cites W2049077943 @default.
• W2073655848 cites W2051806467 @default.
• W2073655848 cites W2068547670 @default.
• W2073655848 cites W2073512634 @default.
• W2073655848 cites W2076638902 @default.
• W2073655848 cites W2084705906 @default.
• W2073655848 cites W2092134978 @default.
• W2073655848 cites W2145633302 @default.
• W2073655848 cites W2313292499 @default.
• W2073655848 doi "https://doi.org/10.1143/jjap.51.09mf13" @default.
• W2073655848 hasPublicationYear "2012" @default.
• W2073655848 type Work @default.
• W2073655848 sameAs 2073655848 @default.
• W2073655848 citedByCount "1" @default.
• W2073655848 countsByYear W20736558482013 @default.
• W2073655848 crossrefType "journal-article" @default.
• W2073655848 hasAuthorship W2073655848A5013123379 @default.
• W2073655848 hasAuthorship W2073655848A5019132282 @default.
• W2073655848 hasAuthorship W2073655848A5028907255 @default.
• W2073655848 hasAuthorship W2073655848A5046420181 @default.
• W2073655848 hasAuthorship W2073655848A5053829893 @default.
• W2073655848 hasAuthorship W2073655848A5075301361 @default.
• W2073655848 hasAuthorship W2073655848A5077895127 @default.
• W2073655848 hasConcept C113196181 @default.
• W2073655848 hasConcept C127413603 @default.
• W2073655848 hasConcept C133386390 @default.
• W2073655848 hasConcept C139719470 @default.
• W2073655848 hasConcept C159985019 @default.
• W2073655848 hasConcept C162324750 @default.
• W2073655848 hasConcept C168651791 @default.
• W2073655848 hasConcept C171250308 @default.
• W2073655848 hasConcept C185592680 @default.
• W2073655848 hasConcept C19067145 @default.
• W2073655848 hasConcept C192562407 @default.
• W2073655848 hasConcept C2777042071 @default.
• W2073655848 hasConcept C38398224 @default.
• W2073655848 hasConcept C42360764 @default.
• W2073655848 hasConcept C43617362 @default.
• W2073655848 hasConcept C45206210 @default.
• W2073655848 hasConcept C49040817 @default.
• W2073655848 hasConcept C56052488 @default.
• W2073655848 hasConcept C8010536 @default.
• W2073655848 hasConcept C87976508 @default.
• W2073655848 hasConceptScore W2073655848C113196181 @default.
• W2073655848 hasConceptScore W2073655848C127413603 @default.
• W2073655848 hasConceptScore W2073655848C133386390 @default.
• W2073655848 hasConceptScore W2073655848C139719470 @default.
• W2073655848 hasConceptScore W2073655848C159985019 @default.
• W2073655848 hasConceptScore W2073655848C162324750 @default.
• W2073655848 hasConceptScore W2073655848C168651791 @default.
• W2073655848 hasConceptScore W2073655848C171250308 @default.
• W2073655848 hasConceptScore W2073655848C185592680 @default.
• W2073655848 hasConceptScore W2073655848C19067145 @default.
• W2073655848 hasConceptScore W2073655848C192562407 @default.
• W2073655848 hasConceptScore W2073655848C2777042071 @default.
• W2073655848 hasConceptScore W2073655848C38398224 @default.
• W2073655848 hasConceptScore W2073655848C42360764 @default.
• W2073655848 hasConceptScore W2073655848C43617362 @default.
• W2073655848 hasConceptScore W2073655848C45206210 @default.
• W2073655848 hasConceptScore W2073655848C49040817 @default.
• W2073655848 hasConceptScore W2073655848C56052488 @default.
• W2073655848 hasConceptScore W2073655848C8010536 @default.
• W2073655848 hasConceptScore W2073655848C87976508 @default.
• W2073655848 hasIssue "9S2" @default.
• W2073655848 hasLocation W20736558481 @default.
• W2073655848 hasOpenAccess W2073655848 @default.
• W2073655848 hasPrimaryLocation W20736558481 @default.
• W2073655848 hasRelatedWork W1998106187 @default.
• W2073655848 hasRelatedWork W2006022085 @default.
• W2073655848 hasRelatedWork W2021714583 @default.
• W2073655848 hasRelatedWork W2039714991 @default.

• next