Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073701719> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2073701719 endingPage "54" @default.
- W2073701719 startingPage "37" @default.
- W2073701719 abstract "A contrast enhancing system using a photosensitive layer on top of a conventional photoresist is described. This light-sensitive system, whose optical properties change upon exposure, is based on intermolecular charge-transfer complexes (CTC). The image of the mask is defined in the top layer at the wavelength of the CTC absorption maximum. After fixation of the built-on-mask, a flood exposure is performed to replicate the image on the photoresist bottom layer. The physicochemical properties and the application to photolithography of such a system are described. Two systems improving the imaging capabilities are investigated: built-on-mask technique and contrast-enhancement layer." @default.
- W2073701719 created "2016-06-24" @default.
- W2073701719 creator A5004984510 @default.
- W2073701719 creator A5066748734 @default.
- W2073701719 creator A5072690336 @default.
- W2073701719 date "1988-08-01" @default.
- W2073701719 modified "2023-09-25" @default.
- W2073701719 title "Charge-transfer complexes applied to photolithography by formation of a portable conformable mask and as a contrast-enhancement layer" @default.
- W2073701719 cites W2001119951 @default.
- W2073701719 cites W2030949494 @default.
- W2073701719 cites W2035140700 @default.
- W2073701719 cites W2113885627 @default.
- W2073701719 cites W2125393942 @default.
- W2073701719 cites W3173309699 @default.
- W2073701719 cites W657666059 @default.
- W2073701719 doi "https://doi.org/10.1016/0167-9317(88)90006-8" @default.
- W2073701719 hasPublicationYear "1988" @default.
- W2073701719 type Work @default.
- W2073701719 sameAs 2073701719 @default.
- W2073701719 citedByCount "2" @default.
- W2073701719 countsByYear W20737017192012 @default.
- W2073701719 crossrefType "journal-article" @default.
- W2073701719 hasAuthorship W2073701719A5004984510 @default.
- W2073701719 hasAuthorship W2073701719A5066748734 @default.
- W2073701719 hasAuthorship W2073701719A5072690336 @default.
- W2073701719 hasConcept C105487726 @default.
- W2073701719 hasConcept C120665830 @default.
- W2073701719 hasConcept C121332964 @default.
- W2073701719 hasConcept C134406635 @default.
- W2073701719 hasConcept C159985019 @default.
- W2073701719 hasConcept C171250308 @default.
- W2073701719 hasConcept C192562407 @default.
- W2073701719 hasConcept C204223013 @default.
- W2073701719 hasConcept C2776502983 @default.
- W2073701719 hasConcept C2779227376 @default.
- W2073701719 hasConcept C49040817 @default.
- W2073701719 hasConcept C53524968 @default.
- W2073701719 hasConcept C6260449 @default.
- W2073701719 hasConcept C86072612 @default.
- W2073701719 hasConceptScore W2073701719C105487726 @default.
- W2073701719 hasConceptScore W2073701719C120665830 @default.
- W2073701719 hasConceptScore W2073701719C121332964 @default.
- W2073701719 hasConceptScore W2073701719C134406635 @default.
- W2073701719 hasConceptScore W2073701719C159985019 @default.
- W2073701719 hasConceptScore W2073701719C171250308 @default.
- W2073701719 hasConceptScore W2073701719C192562407 @default.
- W2073701719 hasConceptScore W2073701719C204223013 @default.
- W2073701719 hasConceptScore W2073701719C2776502983 @default.
- W2073701719 hasConceptScore W2073701719C2779227376 @default.
- W2073701719 hasConceptScore W2073701719C49040817 @default.
- W2073701719 hasConceptScore W2073701719C53524968 @default.
- W2073701719 hasConceptScore W2073701719C6260449 @default.
- W2073701719 hasConceptScore W2073701719C86072612 @default.
- W2073701719 hasIssue "1-2" @default.
- W2073701719 hasLocation W20737017191 @default.
- W2073701719 hasOpenAccess W2073701719 @default.
- W2073701719 hasPrimaryLocation W20737017191 @default.
- W2073701719 hasRelatedWork W2011598260 @default.
- W2073701719 hasRelatedWork W2023999549 @default.
- W2073701719 hasRelatedWork W2038630043 @default.
- W2073701719 hasRelatedWork W2063746987 @default.
- W2073701719 hasRelatedWork W2073701719 @default.
- W2073701719 hasRelatedWork W2095215057 @default.
- W2073701719 hasRelatedWork W2095314224 @default.
- W2073701719 hasRelatedWork W3007549791 @default.
- W2073701719 hasRelatedWork W4246238382 @default.
- W2073701719 hasRelatedWork W2514501518 @default.
- W2073701719 hasVolume "8" @default.
- W2073701719 isParatext "false" @default.
- W2073701719 isRetracted "false" @default.
- W2073701719 magId "2073701719" @default.
- W2073701719 workType "article" @default.