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- W2073708195 endingPage "9445" @default.
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- W2073708195 abstract "Extended x-ray-absorption fine-structure (EXAFS) measurements were performed on As heavily implanted crystalline silicon, using total electron yield and fluorescence detection to study a large range of implanted doses: 5ifmmodetimeselsetexttimesfi{}${10}^{15}$, 3, and 5ifmmodetimeselsetexttimesfi{}${10}^{16}$ As/${mathrm{cm}}^{2}$. The electrical deactivation of these samples after laser and subsequent thermal annealing (from 350 ifmmode^circelsetextdegreefi{}C up to 1000 ifmmode^circelsetextdegreefi{}C) is studied through the evolution of the first two shells of neighbors around As atoms. For an annealing temperature lower than 750 ifmmode^circelsetextdegreefi{}C, a model consistent with the EXAFS results is presented, in which the As deactivation is due to the formation of inactive clusters involving about 7 As atoms around one vacancy. For a higher annealing temperature (750--1000 ifmmode^circelsetextdegreefi{}C) the EXAFS results suggest the coexistence of clusters and precipitates in equilibrium." @default.
- W2073708195 created "2016-06-24" @default.
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- W2073708195 date "1992-10-15" @default.
- W2073708195 modified "2023-10-03" @default.
- W2073708195 title "Extended x-ray-absorption fine-structure study of the local atomic structure inAs+heavily implanted silicon" @default.
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- W2073708195 doi "https://doi.org/10.1103/physrevb.46.9434" @default.
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