FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073722598> ?p ?o ?g. }

• W2073722598 endingPage "4775" @default.
• W2073722598 startingPage "4772" @default.
• W2073722598 abstract "The growth behavior of InAs on Si using metalorganic vapor phase epitaxy (MOVPE) was studied. The large lattice mismatch of InAs to Si, ∼12%, results in island formation under typical MOVPE growth conditions, which prevents the development of the thin coherent films of InAs needed for high-speed device applications. The growth of InAs at low temperature is expected to lead to rapid nucleation and low surface mobility, resulting in the formation of a coherent film at low thicknesses. This study explored the growth behavior of InAs on Si at low temperatures, i.e. <350 °C and varying V/III ratio. InAs films were grown on {1 0 0}-, {1 1 1}- and {2 1 1}-oriented Si substrates using trimethyl indium, tertiary butyl arsine and AsH3. Small islands ranging from 15 to 30 nm form on the samples at growth temperatures <325 °C. Subsequent annealing of this thin layer at 600 °C for 5 min leads to island coarsening. High-resolution X-ray diffraction, atomic force microscopy and scanning electron microscopy were used to characterize InAs layer grown on Si." @default.
• W2073722598 created "2016-06-24" @default.
• W2073722598 creator A5000583482 @default.
• W2073722598 creator A5001538910 @default.
• W2073722598 creator A5006818764 @default.
• W2073722598 creator A5010892958 @default.
• W2073722598 creator A5023575985 @default.
• W2073722598 creator A5053232492 @default.
• W2073722598 creator A5081807310 @default.
• W2073722598 creator A5088100212 @default.
• W2073722598 date "2008-11-01" @default.
• W2073722598 modified "2023-09-23" @default.
• W2073722598 title "Growth of InAs on Si substrates at low temperatures using metalorganic vapor phase epitaxy" @default.
• W2073722598 cites W1173427 @default.
• W2073722598 cites W1970316078 @default.
• W2073722598 cites W1978119689 @default.
• W2073722598 cites W1983332866 @default.
• W2073722598 cites W1985978065 @default.
• W2073722598 cites W1992313456 @default.
• W2073722598 cites W2002965859 @default.
• W2073722598 cites W2007341960 @default.
• W2073722598 cites W2019160358 @default.
• W2073722598 cites W2024470517 @default.
• W2073722598 cites W2025544553 @default.
• W2073722598 cites W2046604209 @default.
• W2073722598 cites W2065692758 @default.
• W2073722598 cites W2067601925 @default.
• W2073722598 cites W2068551989 @default.
• W2073722598 cites W2075275295 @default.
• W2073722598 cites W2078588766 @default.
• W2073722598 cites W2080599350 @default.
• W2073722598 cites W2083464126 @default.
• W2073722598 cites W2143720436 @default.
• W2073722598 cites W2015602256 @default.
• W2073722598 doi "https://doi.org/10.1016/j.jcrysgro.2008.07.048" @default.
• W2073722598 hasPublicationYear "2008" @default.
• W2073722598 type Work @default.
• W2073722598 sameAs 2073722598 @default.
• W2073722598 citedByCount "12" @default.
• W2073722598 countsByYear W20737225982012 @default.
• W2073722598 countsByYear W20737225982013 @default.
• W2073722598 countsByYear W20737225982015 @default.
• W2073722598 countsByYear W20737225982018 @default.
• W2073722598 countsByYear W20737225982019 @default.
• W2073722598 crossrefType "journal-article" @default.
• W2073722598 hasAuthorship W2073722598A5000583482 @default.
• W2073722598 hasAuthorship W2073722598A5001538910 @default.
• W2073722598 hasAuthorship W2073722598A5006818764 @default.
• W2073722598 hasAuthorship W2073722598A5010892958 @default.
• W2073722598 hasAuthorship W2073722598A5023575985 @default.
• W2073722598 hasAuthorship W2073722598A5053232492 @default.
• W2073722598 hasAuthorship W2073722598A5081807310 @default.
• W2073722598 hasAuthorship W2073722598A5088100212 @default.
• W2073722598 hasConcept C110738630 @default.
• W2073722598 hasConcept C113196181 @default.
• W2073722598 hasConcept C161790260 @default.
• W2073722598 hasConcept C171250308 @default.
• W2073722598 hasConcept C175665537 @default.
• W2073722598 hasConcept C178790620 @default.
• W2073722598 hasConcept C185592680 @default.
• W2073722598 hasConcept C19067145 @default.
• W2073722598 hasConcept C191897082 @default.
• W2073722598 hasConcept C192562407 @default.
• W2073722598 hasConcept C2776776902 @default.
• W2073722598 hasConcept C2777716191 @default.
• W2073722598 hasConcept C2777855556 @default.
• W2073722598 hasConcept C2779227376 @default.
• W2073722598 hasConcept C43617362 @default.
• W2073722598 hasConcept C49040817 @default.
• W2073722598 hasConcept C543292547 @default.
• W2073722598 hasConcept C55493867 @default.
• W2073722598 hasConcept C57410435 @default.
• W2073722598 hasConcept C61048295 @default.
• W2073722598 hasConcept C8010536 @default.
• W2073722598 hasConceptScore W2073722598C110738630 @default.
• W2073722598 hasConceptScore W2073722598C113196181 @default.
• W2073722598 hasConceptScore W2073722598C161790260 @default.
• W2073722598 hasConceptScore W2073722598C171250308 @default.
• W2073722598 hasConceptScore W2073722598C175665537 @default.
• W2073722598 hasConceptScore W2073722598C178790620 @default.
• W2073722598 hasConceptScore W2073722598C185592680 @default.
• W2073722598 hasConceptScore W2073722598C19067145 @default.
• W2073722598 hasConceptScore W2073722598C191897082 @default.
• W2073722598 hasConceptScore W2073722598C192562407 @default.
• W2073722598 hasConceptScore W2073722598C2776776902 @default.
• W2073722598 hasConceptScore W2073722598C2777716191 @default.
• W2073722598 hasConceptScore W2073722598C2777855556 @default.
• W2073722598 hasConceptScore W2073722598C2779227376 @default.
• W2073722598 hasConceptScore W2073722598C43617362 @default.
• W2073722598 hasConceptScore W2073722598C49040817 @default.
• W2073722598 hasConceptScore W2073722598C543292547 @default.
• W2073722598 hasConceptScore W2073722598C55493867 @default.
• W2073722598 hasConceptScore W2073722598C57410435 @default.
• W2073722598 hasConceptScore W2073722598C61048295 @default.
• W2073722598 hasConceptScore W2073722598C8010536 @default.
• W2073722598 hasIssue "23" @default.
• W2073722598 hasLocation W20737225981 @default.
• W2073722598 hasOpenAccess W2073722598 @default.

• next