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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073742603> ?p ?o ?g. }

• W2073742603 endingPage "395203" @default.
• W2073742603 startingPage "395203" @default.
• W2073742603 abstract "Using particle-in-cell simulations we perform a characterization of the ion flux and ion energy in a capacitively coupled rf plasma reactor excited with non-sinusoidal voltage waveforms. The waveforms used are positive Gaussian type pulses (with a repetition frequency of 13.56?MHz), and as the pulse width is decreased, three main effects are identified that are not present in typical symmetric sinusoidal discharges: (1) the ion flux (and plasma density) rapidly increases, (2) as the pressure increases a significant asymmetry in the ion fluxes to the powered and grounded electrodes develops and (3) the average ion energy on the grounded electrode cannot be made arbitrarily small, but in fact remains essentially constant (together with the bias voltage) for the pressures investigated (20?500?mTorr). Effects (1) and (3) potentially offer a new form of control in these types of rf discharges, where the ion flux can be increased while keeping the average ion energy on the grounded electrode constant. This is in contrast with the opposite control mechanism recently identified in Donk? et al (2009 J. Phys. D: Appl. Phys. 42 025205), where by changing the phase angle between applied voltage harmonics the ion flux can be kept constant while the ion energy (and bias voltage) varies." @default.
• W2073742603 created "2016-06-24" @default.
• W2073742603 creator A5085305605 @default.
• W2073742603 creator A5087112192 @default.
• W2073742603 date "2012-09-13" @default.
• W2073742603 modified "2023-10-18" @default.
• W2073742603 title "Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms" @default.
• W2073742603 cites W1963643954 @default.
• W2073742603 cites W1967666484 @default.
• W2073742603 cites W1977610920 @default.
• W2073742603 cites W1993361798 @default.
• W2073742603 cites W2000786278 @default.
• W2073742603 cites W2010839848 @default.
• W2073742603 cites W2017981825 @default.
• W2073742603 cites W2022650975 @default.
• W2073742603 cites W2040464194 @default.
• W2073742603 cites W2041746154 @default.
• W2073742603 cites W2050668733 @default.
• W2073742603 cites W2061139552 @default.
• W2073742603 cites W2083243597 @default.
• W2073742603 cites W2085456433 @default.
• W2073742603 cites W2090851454 @default.
• W2073742603 cites W2093344961 @default.
• W2073742603 cites W2094750120 @default.
• W2073742603 cites W2115482876 @default.
• W2073742603 cites W2123466980 @default.
• W2073742603 cites W2123761964 @default.
• W2073742603 cites W2150759874 @default.
• W2073742603 cites W2151160326 @default.
• W2073742603 cites W2158196597 @default.
• W2073742603 cites W2493880907 @default.
• W2073742603 doi "https://doi.org/10.1088/0022-3727/45/39/395203" @default.
• W2073742603 hasPublicationYear "2012" @default.
• W2073742603 type Work @default.
• W2073742603 sameAs 2073742603 @default.
• W2073742603 citedByCount "59" @default.
• W2073742603 countsByYear W20737426032012 @default.
• W2073742603 countsByYear W20737426032013 @default.
• W2073742603 countsByYear W20737426032014 @default.
• W2073742603 countsByYear W20737426032015 @default.
• W2073742603 countsByYear W20737426032016 @default.
• W2073742603 countsByYear W20737426032017 @default.
• W2073742603 countsByYear W20737426032018 @default.
• W2073742603 countsByYear W20737426032019 @default.
• W2073742603 countsByYear W20737426032020 @default.
• W2073742603 countsByYear W20737426032021 @default.
• W2073742603 countsByYear W20737426032022 @default.
• W2073742603 crossrefType "journal-article" @default.
• W2073742603 hasAuthorship W2073742603A5085305605 @default.
• W2073742603 hasAuthorship W2073742603A5087112192 @default.
• W2073742603 hasConcept C121332964 @default.
• W2073742603 hasConcept C145148216 @default.
• W2073742603 hasConcept C154945302 @default.
• W2073742603 hasConcept C165801399 @default.
• W2073742603 hasConcept C184779094 @default.
• W2073742603 hasConcept C185592680 @default.
• W2073742603 hasConcept C186370098 @default.
• W2073742603 hasConcept C191897082 @default.
• W2073742603 hasConcept C192562407 @default.
• W2073742603 hasConcept C197424946 @default.
• W2073742603 hasConcept C2775924081 @default.
• W2073742603 hasConcept C41008148 @default.
• W2073742603 hasConcept C47446073 @default.
• W2073742603 hasConcept C57879066 @default.
• W2073742603 hasConcept C62520636 @default.
• W2073742603 hasConcept C68709404 @default.
• W2073742603 hasConceptScore W2073742603C121332964 @default.
• W2073742603 hasConceptScore W2073742603C145148216 @default.
• W2073742603 hasConceptScore W2073742603C154945302 @default.
• W2073742603 hasConceptScore W2073742603C165801399 @default.
• W2073742603 hasConceptScore W2073742603C184779094 @default.
• W2073742603 hasConceptScore W2073742603C185592680 @default.
• W2073742603 hasConceptScore W2073742603C186370098 @default.
• W2073742603 hasConceptScore W2073742603C191897082 @default.
• W2073742603 hasConceptScore W2073742603C192562407 @default.
• W2073742603 hasConceptScore W2073742603C197424946 @default.
• W2073742603 hasConceptScore W2073742603C2775924081 @default.
• W2073742603 hasConceptScore W2073742603C41008148 @default.
• W2073742603 hasConceptScore W2073742603C47446073 @default.
• W2073742603 hasConceptScore W2073742603C57879066 @default.
• W2073742603 hasConceptScore W2073742603C62520636 @default.
• W2073742603 hasConceptScore W2073742603C68709404 @default.
• W2073742603 hasIssue "39" @default.
• W2073742603 hasLocation W20737426031 @default.
• W2073742603 hasLocation W20737426032 @default.
• W2073742603 hasLocation W20737426033 @default.
• W2073742603 hasOpenAccess W2073742603 @default.
• W2073742603 hasPrimaryLocation W20737426031 @default.
• W2073742603 hasRelatedWork W1997086491 @default.
• W2073742603 hasRelatedWork W2050780286 @default.
• W2073742603 hasRelatedWork W2061606112 @default.
• W2073742603 hasRelatedWork W2091296259 @default.
• W2073742603 hasRelatedWork W2225471365 @default.
• W2073742603 hasRelatedWork W2652100805 @default.
• W2073742603 hasRelatedWork W2899084033 @default.
• W2073742603 hasRelatedWork W3111172706 @default.
• W2073742603 hasRelatedWork W4283695275 @default.
• W2073742603 hasRelatedWork W4313678637 @default.

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