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- W2073851312 abstract "As with any concept in its early stages or realization, there are many ways of thinking about what we call "process integration" in semiconductor manufacturing. In its most simple form, we consider it to be the combining of two or more sequential processing steps, normally performed in separate systems, into a unified process flow within one fabrication tool." @default.
- W2073851312 created "2016-06-24" @default.
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- W2073851312 date "1990-02-15" @default.
- W2073851312 modified "2023-09-23" @default.
- W2073851312 title "Process Integration: The Future of Chipmaking" @default.
- W2073851312 doi "https://doi.org/10.1117/12.963938" @default.
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