Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073991034> ?p ?o ?g. }
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- W2073991034 endingPage "1155" @default.
- W2073991034 startingPage "1147" @default.
- W2073991034 abstract "As time progresses, integrated circuit feature-sizes along with alignment tolerances are shrinking while wafer sizes are getting larger. This trend has made life difficult for contact and proximity printers and has made projection printing of an entire wafer within a single lens field no longer possible. The present practical upper limit to the number of resolution elements within a single lens field is ∠108, whereas 1 μm resolution over a 4 in. wafer is the equivalent of 2×109. Partitioning of the optical field by scanning or step-and-repeat printing permits the maximum number of resolution elements on a wafer to grow. Thus the 108 element limit, at least for step-and-repeat printing, applies to the chip. And, in principle, the field of the chip could itself be partitioned by scanning or image stepping. The practical limits to optical lithography will be determined by resolution, overlay, and the characteristics of photoresists. This latter area has received a recent resurgence of effort with the introduction of multilevel and inorganic resists. One distinct benefit of these new classes of resists is the complete elimination of the degrading effects of standing waves and topography. These are key factors for photolithography below 1–1.5 μm. The end of the road for photolithography will probably be somewhere in the range of 0.4–0.8 μm depending on how well we exploit the potentials of deep-UV, image partitioning, and optical design." @default.
- W2073991034 created "2016-06-24" @default.
- W2073991034 creator A5041933680 @default.
- W2073991034 date "1980-09-01" @default.
- W2073991034 modified "2023-10-11" @default.
- W2073991034 title "Optical imaging for microfabrication" @default.
- W2073991034 doi "https://doi.org/10.1116/1.570631" @default.
- W2073991034 hasPublicationYear "1980" @default.
- W2073991034 type Work @default.
- W2073991034 sameAs 2073991034 @default.
- W2073991034 citedByCount "19" @default.
- W2073991034 countsByYear W20739910342022 @default.
- W2073991034 crossrefType "journal-article" @default.
- W2073991034 hasAuthorship W2073991034A5041933680 @default.
- W2073991034 hasConcept C105487726 @default.
- W2073991034 hasConcept C120665830 @default.
- W2073991034 hasConcept C121332964 @default.
- W2073991034 hasConcept C136525101 @default.
- W2073991034 hasConcept C138268822 @default.
- W2073991034 hasConcept C142724271 @default.
- W2073991034 hasConcept C15336307 @default.
- W2073991034 hasConcept C154945302 @default.
- W2073991034 hasConcept C160671074 @default.
- W2073991034 hasConcept C171250308 @default.
- W2073991034 hasConcept C182873914 @default.
- W2073991034 hasConcept C192562407 @default.
- W2073991034 hasConcept C204223013 @default.
- W2073991034 hasConcept C204787440 @default.
- W2073991034 hasConcept C205372480 @default.
- W2073991034 hasConcept C2779227376 @default.
- W2073991034 hasConcept C41008148 @default.
- W2073991034 hasConcept C41794268 @default.
- W2073991034 hasConcept C49040817 @default.
- W2073991034 hasConcept C527607 @default.
- W2073991034 hasConcept C53524968 @default.
- W2073991034 hasConcept C71924100 @default.
- W2073991034 hasConceptScore W2073991034C105487726 @default.
- W2073991034 hasConceptScore W2073991034C120665830 @default.
- W2073991034 hasConceptScore W2073991034C121332964 @default.
- W2073991034 hasConceptScore W2073991034C136525101 @default.
- W2073991034 hasConceptScore W2073991034C138268822 @default.
- W2073991034 hasConceptScore W2073991034C142724271 @default.
- W2073991034 hasConceptScore W2073991034C15336307 @default.
- W2073991034 hasConceptScore W2073991034C154945302 @default.
- W2073991034 hasConceptScore W2073991034C160671074 @default.
- W2073991034 hasConceptScore W2073991034C171250308 @default.
- W2073991034 hasConceptScore W2073991034C182873914 @default.
- W2073991034 hasConceptScore W2073991034C192562407 @default.
- W2073991034 hasConceptScore W2073991034C204223013 @default.
- W2073991034 hasConceptScore W2073991034C204787440 @default.
- W2073991034 hasConceptScore W2073991034C205372480 @default.
- W2073991034 hasConceptScore W2073991034C2779227376 @default.
- W2073991034 hasConceptScore W2073991034C41008148 @default.
- W2073991034 hasConceptScore W2073991034C41794268 @default.
- W2073991034 hasConceptScore W2073991034C49040817 @default.
- W2073991034 hasConceptScore W2073991034C527607 @default.
- W2073991034 hasConceptScore W2073991034C53524968 @default.
- W2073991034 hasConceptScore W2073991034C71924100 @default.
- W2073991034 hasIssue "5" @default.
- W2073991034 hasLocation W20739910341 @default.
- W2073991034 hasOpenAccess W2073991034 @default.
- W2073991034 hasPrimaryLocation W20739910341 @default.
- W2073991034 hasRelatedWork W2013138940 @default.
- W2073991034 hasRelatedWork W2034800215 @default.
- W2073991034 hasRelatedWork W2035734563 @default.
- W2073991034 hasRelatedWork W2149415078 @default.
- W2073991034 hasRelatedWork W2196723929 @default.
- W2073991034 hasRelatedWork W2363718331 @default.
- W2073991034 hasRelatedWork W2625379356 @default.
- W2073991034 hasRelatedWork W2805151322 @default.
- W2073991034 hasRelatedWork W3190396005 @default.
- W2073991034 hasRelatedWork W4243293066 @default.
- W2073991034 hasVolume "17" @default.
- W2073991034 isParatext "false" @default.
- W2073991034 isRetracted "false" @default.
- W2073991034 magId "2073991034" @default.
- W2073991034 workType "article" @default.