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- W2073993475 endingPage "065014" @default.
- W2073993475 startingPage "065014" @default.
- W2073993475 abstract "In this study, we examined the effect of preliminary boron or phosphorous implantation on charge accumulation in the buried oxide of SOI-MOSFETs irradiated with ?-rays in the total dose range (D) of 105?5???107?rad. The buried oxide was obtained by high-temperature thermal oxidation of Si, and it was not subjected to any implantation during the fabrication process of SOI structures. It was found that implantation with boron or phosphorous ions, used in fabrication technologies of SOI-MOSFETs, increases the concentration of precursor traps in the buried oxide of SOI structures. Unlike in the case of boron implantation, phosphorous implantation leads to an increased density of states at the Si/buried SiO2?interface during subsequent ?-irradiation. In the ?-irradiated SOI-MOSFETs, the accumulated charge density and the density of surface states in the Si/buried oxide layer systems both vary in proportion to kiln?D. The coefficients ki for as-fabricated and ion-implanted Si/buried SiO2?systems were evaluated. From the data obtained, it was concluded that a low density of precursor hole traps was a factor limiting the positive charge accumulation in the buried oxide of as-fabricated (non-implanted) SOI structures with the bonded Si/buried SiO2?interface." @default.
- W2073993475 created "2016-06-24" @default.
- W2073993475 creator A5011221335 @default.
- W2073993475 creator A5076303008 @default.
- W2073993475 creator A5076791503 @default.
- W2073993475 creator A5080709714 @default.
- W2073993475 date "2012-05-11" @default.
- W2073993475 modified "2023-10-16" @default.
- W2073993475 title "Charge accumulation in the buried oxide of SOI structures with the bonded Si/SiO2interface under γ-irradiation: effect of preliminary ion implantation" @default.
- W2073993475 cites W1971727572 @default.
- W2073993475 cites W1979932815 @default.
- W2073993475 cites W2024928872 @default.
- W2073993475 cites W2048388713 @default.
- W2073993475 cites W2078570 @default.
- W2073993475 cites W2079699561 @default.
- W2073993475 cites W2105180128 @default.
- W2073993475 cites W2118318987 @default.
- W2073993475 cites W2123883877 @default.
- W2073993475 cites W2135232807 @default.
- W2073993475 cites W2153803145 @default.
- W2073993475 cites W2169278899 @default.
- W2073993475 cites W39747837 @default.
- W2073993475 doi "https://doi.org/10.1088/0268-1242/27/6/065014" @default.
- W2073993475 hasPublicationYear "2012" @default.
- W2073993475 type Work @default.
- W2073993475 sameAs 2073993475 @default.
- W2073993475 citedByCount "3" @default.
- W2073993475 countsByYear W20739934752013 @default.
- W2073993475 countsByYear W20739934752016 @default.
- W2073993475 countsByYear W20739934752017 @default.
- W2073993475 crossrefType "journal-article" @default.
- W2073993475 hasAuthorship W2073993475A5011221335 @default.
- W2073993475 hasAuthorship W2073993475A5076303008 @default.
- W2073993475 hasAuthorship W2073993475A5076791503 @default.
- W2073993475 hasAuthorship W2073993475A5080709714 @default.
- W2073993475 hasConcept C111337013 @default.
- W2073993475 hasConcept C121332964 @default.
- W2073993475 hasConcept C145148216 @default.
- W2073993475 hasConcept C178790620 @default.
- W2073993475 hasConcept C185544564 @default.
- W2073993475 hasConcept C185592680 @default.
- W2073993475 hasConcept C188082385 @default.
- W2073993475 hasConcept C191897082 @default.
- W2073993475 hasConcept C192562407 @default.
- W2073993475 hasConcept C2779851234 @default.
- W2073993475 hasConcept C41823505 @default.
- W2073993475 hasConcept C49040817 @default.
- W2073993475 hasConcept C53143962 @default.
- W2073993475 hasConcept C544956773 @default.
- W2073993475 hasConcept C62520636 @default.
- W2073993475 hasConceptScore W2073993475C111337013 @default.
- W2073993475 hasConceptScore W2073993475C121332964 @default.
- W2073993475 hasConceptScore W2073993475C145148216 @default.
- W2073993475 hasConceptScore W2073993475C178790620 @default.
- W2073993475 hasConceptScore W2073993475C185544564 @default.
- W2073993475 hasConceptScore W2073993475C185592680 @default.
- W2073993475 hasConceptScore W2073993475C188082385 @default.
- W2073993475 hasConceptScore W2073993475C191897082 @default.
- W2073993475 hasConceptScore W2073993475C192562407 @default.
- W2073993475 hasConceptScore W2073993475C2779851234 @default.
- W2073993475 hasConceptScore W2073993475C41823505 @default.
- W2073993475 hasConceptScore W2073993475C49040817 @default.
- W2073993475 hasConceptScore W2073993475C53143962 @default.
- W2073993475 hasConceptScore W2073993475C544956773 @default.
- W2073993475 hasConceptScore W2073993475C62520636 @default.
- W2073993475 hasIssue "6" @default.
- W2073993475 hasLocation W20739934751 @default.
- W2073993475 hasOpenAccess W2073993475 @default.
- W2073993475 hasPrimaryLocation W20739934751 @default.
- W2073993475 hasRelatedWork W1536397480 @default.
- W2073993475 hasRelatedWork W2010481829 @default.
- W2073993475 hasRelatedWork W2036207620 @default.
- W2073993475 hasRelatedWork W2053520333 @default.
- W2073993475 hasRelatedWork W2061797805 @default.
- W2073993475 hasRelatedWork W2087168628 @default.
- W2073993475 hasRelatedWork W2092251850 @default.
- W2073993475 hasRelatedWork W2171429043 @default.
- W2073993475 hasRelatedWork W3101130858 @default.
- W2073993475 hasRelatedWork W2518300032 @default.
- W2073993475 hasVolume "27" @default.
- W2073993475 isParatext "false" @default.
- W2073993475 isRetracted "false" @default.
- W2073993475 magId "2073993475" @default.
- W2073993475 workType "article" @default.