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- W2073996775 abstract "An infrared interference method for monitoring the thickness of a film of polycrystalline silicon during its deposition on oxidized silicon is described. With this method, deposition can be terminated when the desired film thickness is obtained. Qualitative agreement has been found between the calculated and observed variations of the emitted intensity measured during deposition." @default.
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- W2073996775 title "In-Process Thickness Monitor for Polycrystalline Silicon Deposition" @default.
- W2073996775 doi "https://doi.org/10.1149/1.2404114" @default.
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