Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074081820> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2074081820 endingPage "113505" @default.
- W2074081820 startingPage "113505" @default.
- W2074081820 abstract "Experimental observation of the electron density variation in inductively coupled plasmas with the electron energy probability function (EEPFs) was performed at various gas pressures at two RF powers (25 W and 200 W). The measured EEPFs at high power discharges (200 W) showed a Maxwellian distribution, while evolution of the EEPFs from a bi-Maxwellian distribution to a Druyvesteyn-like distribution was observed at low RF powers (25 W) with increasing pressure. A discrepancy of the electron density variation between the two RF powers was observed. This difference is explained by the modified collisional loss and the Bohm velocity from the EEPF of the bi-Maxwellian distribution and the Druyvesteyn–like distribution." @default.
- W2074081820 created "2016-06-24" @default.
- W2074081820 creator A5011499364 @default.
- W2074081820 creator A5032888224 @default.
- W2074081820 creator A5044446885 @default.
- W2074081820 creator A5057494416 @default.
- W2074081820 creator A5087972459 @default.
- W2074081820 creator A5089113908 @default.
- W2074081820 date "2014-11-01" @default.
- W2074081820 modified "2023-10-16" @default.
- W2074081820 title "Power dependence of electron density at various pressures in inductively coupled plasmas" @default.
- W2074081820 cites W1968962825 @default.
- W2074081820 cites W1993413053 @default.
- W2074081820 cites W2006671783 @default.
- W2074081820 cites W2011485974 @default.
- W2074081820 cites W2018116785 @default.
- W2074081820 cites W2021117071 @default.
- W2074081820 cites W2021867095 @default.
- W2074081820 cites W2030330950 @default.
- W2074081820 cites W2032240387 @default.
- W2074081820 cites W2046623549 @default.
- W2074081820 cites W2057571491 @default.
- W2074081820 cites W2061316797 @default.
- W2074081820 cites W2062660564 @default.
- W2074081820 cites W2064244340 @default.
- W2074081820 cites W2090270719 @default.
- W2074081820 cites W2168144843 @default.
- W2074081820 cites W2493880907 @default.
- W2074081820 doi "https://doi.org/10.1063/1.4901305" @default.
- W2074081820 hasPublicationYear "2014" @default.
- W2074081820 type Work @default.
- W2074081820 sameAs 2074081820 @default.
- W2074081820 citedByCount "7" @default.
- W2074081820 countsByYear W20740818202015 @default.
- W2074081820 countsByYear W20740818202016 @default.
- W2074081820 countsByYear W20740818202017 @default.
- W2074081820 countsByYear W20740818202018 @default.
- W2074081820 countsByYear W20740818202019 @default.
- W2074081820 countsByYear W20740818202020 @default.
- W2074081820 crossrefType "journal-article" @default.
- W2074081820 hasAuthorship W2074081820A5011499364 @default.
- W2074081820 hasAuthorship W2074081820A5032888224 @default.
- W2074081820 hasAuthorship W2074081820A5044446885 @default.
- W2074081820 hasAuthorship W2074081820A5057494416 @default.
- W2074081820 hasAuthorship W2074081820A5087972459 @default.
- W2074081820 hasAuthorship W2074081820A5089113908 @default.
- W2074081820 hasBestOaLocation W20740818201 @default.
- W2074081820 hasConcept C121332964 @default.
- W2074081820 hasConcept C125485243 @default.
- W2074081820 hasConcept C147120987 @default.
- W2074081820 hasConcept C184779094 @default.
- W2074081820 hasConcept C185544564 @default.
- W2074081820 hasConcept C186603090 @default.
- W2074081820 hasConcept C22175881 @default.
- W2074081820 hasConcept C82706917 @default.
- W2074081820 hasConcept C95974651 @default.
- W2074081820 hasConcept C97355855 @default.
- W2074081820 hasConceptScore W2074081820C121332964 @default.
- W2074081820 hasConceptScore W2074081820C125485243 @default.
- W2074081820 hasConceptScore W2074081820C147120987 @default.
- W2074081820 hasConceptScore W2074081820C184779094 @default.
- W2074081820 hasConceptScore W2074081820C185544564 @default.
- W2074081820 hasConceptScore W2074081820C186603090 @default.
- W2074081820 hasConceptScore W2074081820C22175881 @default.
- W2074081820 hasConceptScore W2074081820C82706917 @default.
- W2074081820 hasConceptScore W2074081820C95974651 @default.
- W2074081820 hasConceptScore W2074081820C97355855 @default.
- W2074081820 hasFunder F4320322030 @default.
- W2074081820 hasIssue "11" @default.
- W2074081820 hasLocation W20740818201 @default.
- W2074081820 hasOpenAccess W2074081820 @default.
- W2074081820 hasPrimaryLocation W20740818201 @default.
- W2074081820 hasRelatedWork W1601588525 @default.
- W2074081820 hasRelatedWork W1964150862 @default.
- W2074081820 hasRelatedWork W2025360208 @default.
- W2074081820 hasRelatedWork W2069397480 @default.
- W2074081820 hasRelatedWork W2088014134 @default.
- W2074081820 hasRelatedWork W2101462281 @default.
- W2074081820 hasRelatedWork W2335671780 @default.
- W2074081820 hasRelatedWork W2376604896 @default.
- W2074081820 hasRelatedWork W3162271292 @default.
- W2074081820 hasRelatedWork W4321135046 @default.
- W2074081820 hasVolume "21" @default.
- W2074081820 isParatext "false" @default.
- W2074081820 isRetracted "false" @default.
- W2074081820 magId "2074081820" @default.
- W2074081820 workType "article" @default.