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- W2074087029 abstract "Neutron reflectivity is used to elucidate the morphology of silane films deposited on silicon wafers, and the response of these films to vapors of swelling solvents. Bis-silyl functional silanes studied here have six hydrolyzable groups and are believed to be more crosslinked than tri- and tetra-functional analogs. The enhanced crosslinking leads to better barrier properties in anti-corrosion applications. In this study, solvent swelling is used to assess the degree of condensation and the crosslink density in bis-[trimethoxysilylpropyl]amine (bis-amino) films. Nitrobenzene swells the films but does not react chemically with the films. The results show that bis-amino silane films are highly condensed, with a nitrobenzene-depleted layer near the silicon substrate. D2O both swells (at 25°C and 80°C) and chemically alters the films (at 80°C). The reflectivity data upon exposure to D2O vapors at 80°C are consistent with exchange of the amino proton (1H) with deuterium (D). A hydrophilic layer is postulated at..." @default.
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- W2074087029 date "2003-01-01" @default.
- W2074087029 modified "2023-10-18" @default.
- W2074087029 title "Neutron reflectivity investigation of bis-amino silane films" @default.
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- W2074087029 doi "https://doi.org/10.1163/156856103772150779" @default.
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