FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074094850> ?p ?o ?g. }

• W2074094850 endingPage "025035" @default.
• W2074094850 startingPage "025035" @default.
• W2074094850 abstract "An O2/Ar inductively coupled plasma is investigated by a Langmuir probe and a global model (volume averaged model). The electron density, electron temperature and electron energy distribution function (EEDF) are measured at different O2 contents, gas pressures and applied powers. At fixed pressure and power, the electron density first drops quickly with the O2 ratio and then tends to saturate in the high O2 ratio range. The effective electron temperature exhibits completely opposite behaviors at low and high pressures. This is caused by the different evolving behaviors of low and high energy electrons of the EEDFs with the O2 ratio. Both the Langmuir probe and the global model predict that the electron density of O2/Ar mixed plasma first increases, peaks and then drops constantly, upon increasing the pressure. An analysis based on the simulation reveals that the non-monotonic variation of electron density with the pressure is due to the non-monotonic variation of the ionizations from both ground state O and metastable O*. Due to the strong ionizations, the electron density increases linearly with the power. The effective electron temperature is unchanged because the EEDF shape that determines the electron temperature is not varied upon increasing the power. The calculated electron density and temperature when varying the power agree better with the experiments at high pressure, i.e. 45 mTorr. The quantitative deviation between the model and the experiment when varying the pressure and the O2 ratio can be explained by two aspects. (1) The electron energy probability function is assumed to have a Maxwellian distribution in the global model while the realistic EEDFs vary significantly with the pressure and/or the O2 ratio, as revealed by the experiment. (2) The power transfer efficiency (i.e. the fraction of the power coupled into plasma) increases with the pressure." @default.
• W2074094850 created "2016-06-24" @default.
• W2074094850 creator A5038947507 @default.
• W2074094850 creator A5065795963 @default.
• W2074094850 creator A5066088212 @default.
• W2074094850 creator A5071037763 @default.
• W2074094850 creator A5081242145 @default.
• W2074094850 date "2015-04-07" @default.
• W2074094850 modified "2023-10-18" @default.
• W2074094850 title "Characterization of O₂/Ar inductively coupled plasma studied by using a Langmuir probe and global model" @default.
• W2074094850 cites W1968590512 @default.
• W2074094850 cites W1970620704 @default.
• W2074094850 cites W1975126890 @default.
• W2074094850 cites W1978599936 @default.
• W2074094850 cites W1996487032 @default.
• W2074094850 cites W2000523150 @default.
• W2074094850 cites W2000814880 @default.
• W2074094850 cites W2009408641 @default.
• W2074094850 cites W2010644890 @default.
• W2074094850 cites W2011617331 @default.
• W2074094850 cites W2012380215 @default.
• W2074094850 cites W2013712853 @default.
• W2074094850 cites W2016134900 @default.
• W2074094850 cites W2017756651 @default.
• W2074094850 cites W2024117650 @default.
• W2074094850 cites W2028679502 @default.
• W2074094850 cites W2041486334 @default.
• W2074094850 cites W2046623549 @default.
• W2074094850 cites W2052116847 @default.
• W2074094850 cites W2055380234 @default.
• W2074094850 cites W2056559477 @default.
• W2074094850 cites W2057800155 @default.
• W2074094850 cites W2059168091 @default.
• W2074094850 cites W2059878017 @default.
• W2074094850 cites W2060239740 @default.
• W2074094850 cites W2065398634 @default.
• W2074094850 cites W2083522909 @default.
• W2074094850 cites W2086149580 @default.
• W2074094850 cites W2090910147 @default.
• W2074094850 cites W2094678172 @default.
• W2074094850 cites W2116666365 @default.
• W2074094850 cites W2154775754 @default.
• W2074094850 cites W2168144843 @default.
• W2074094850 cites W2205590358 @default.
• W2074094850 cites W2493880907 @default.
• W2074094850 cites W4239880439 @default.
• W2074094850 cites W4247186121 @default.
• W2074094850 cites W4250959290 @default.
• W2074094850 doi "https://doi.org/10.1088/0963-0252/24/2/025035" @default.
• W2074094850 hasPublicationYear "2015" @default.
• W2074094850 type Work @default.
• W2074094850 sameAs 2074094850 @default.
• W2074094850 citedByCount "21" @default.
• W2074094850 countsByYear W20740948502015 @default.
• W2074094850 countsByYear W20740948502016 @default.
• W2074094850 countsByYear W20740948502017 @default.
• W2074094850 countsByYear W20740948502019 @default.
• W2074094850 countsByYear W20740948502020 @default.
• W2074094850 countsByYear W20740948502021 @default.
• W2074094850 countsByYear W20740948502022 @default.
• W2074094850 countsByYear W20740948502023 @default.
• W2074094850 crossrefType "journal-article" @default.
• W2074094850 hasAuthorship W2074094850A5038947507 @default.
• W2074094850 hasAuthorship W2074094850A5065795963 @default.
• W2074094850 hasAuthorship W2074094850A5066088212 @default.
• W2074094850 hasAuthorship W2074094850A5071037763 @default.
• W2074094850 hasAuthorship W2074094850A5081242145 @default.
• W2074094850 hasConcept C113196181 @default.
• W2074094850 hasConcept C121332964 @default.
• W2074094850 hasConcept C125485243 @default.
• W2074094850 hasConcept C145148216 @default.
• W2074094850 hasConcept C147120987 @default.
• W2074094850 hasConcept C159985019 @default.
• W2074094850 hasConcept C176118016 @default.
• W2074094850 hasConcept C178790620 @default.
• W2074094850 hasConcept C184779094 @default.
• W2074094850 hasConcept C185592680 @default.
• W2074094850 hasConcept C192562407 @default.
• W2074094850 hasConcept C204323151 @default.
• W2074094850 hasConcept C20556612 @default.
• W2074094850 hasConcept C22175881 @default.
• W2074094850 hasConcept C43503373 @default.
• W2074094850 hasConcept C43617362 @default.
• W2074094850 hasConcept C547737533 @default.
• W2074094850 hasConcept C62520636 @default.
• W2074094850 hasConcept C82706917 @default.
• W2074094850 hasConcept C97355855 @default.
• W2074094850 hasConceptScore W2074094850C113196181 @default.
• W2074094850 hasConceptScore W2074094850C121332964 @default.
• W2074094850 hasConceptScore W2074094850C125485243 @default.
• W2074094850 hasConceptScore W2074094850C145148216 @default.
• W2074094850 hasConceptScore W2074094850C147120987 @default.
• W2074094850 hasConceptScore W2074094850C159985019 @default.
• W2074094850 hasConceptScore W2074094850C176118016 @default.
• W2074094850 hasConceptScore W2074094850C178790620 @default.
• W2074094850 hasConceptScore W2074094850C184779094 @default.
• W2074094850 hasConceptScore W2074094850C185592680 @default.
• W2074094850 hasConceptScore W2074094850C192562407 @default.

• next