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- W2074128208 abstract "Electron cyclotron resonance nitrous oxide plasma oxidation has been investigated as a process to grow thin oxide on polycrystalline silicon and (100), (111), and (110) oriented crystalline silicon. In spite of a low thermal budget, plasma oxidation incorporates nitrogen atoms at the silicon/silicon dioxide interface and forms a nitrogen‐rich layer. The incorporated nitrogen atoms are tightly bound to silicon atoms at the interface with N (1s) electron energy of 397.8 eV. The oxidation rate in plasma is less dependent on crystalline orientation in comparison with thermal , and is therefore nearly identical in poly‐ and single‐crystalline‐Si. Polysilicon oxide (polyoxide) grown by plasma oxidation exhibits better electrical properties than thermally grown oxides; this is attributed to the smooth interface between the polyoxide and a poly‐Si film. Polysilicon thin film transistors fabricated with plasma oxide show improved performance, which is attributed not only to the smooth interface but also to oxygen‐ and nitrogen‐plasma passivation." @default.
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- W2074128208 date "1997-09-01" @default.
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- W2074128208 title "Oxidation of Silicon Using Electron Cyclotron Resonance Nitrous Oxide Plasma and Its Application to Polycrystalline Silicon Thin Film Transistors" @default.
- W2074128208 doi "https://doi.org/10.1149/1.1837998" @default.
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