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- W2074163058 abstract "The piezoelectric effect in GaAs is investigated for potential use in sensor and resonator applications. Flexural resonant vibrations of GaAs tuning-fork structures have been excited at 33 kHz, with measured performance in excellent agreement with predictions. Longitudinal vibrations can equally well be activated. High Q-values at atmospheric pressure (Q=570000 at 4 MHz) have been measured for thickness shear vibrations of (100) GaAs wafers, using lateral electric field excitation. The temperature and stress dependences of the resonance frequency are important features when designing GaAs sensors. The temperature dependences of the frequency range from -59 ppm degrees C-1 to -48 ppm degrees C-1, and the stress dependences are at least 200 ppm MPa-1 and 39 ppm MPa-1 for tensile stress of flexural and shear vibrations, respectively. The semiconducting nature of GaAs affects the piezoelectric behaviour only at high temperatures. The successful experiments open up many possibilities of new resonator and resonant sensor concepts." @default.
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- W2074163058 date "1994-03-01" @default.
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- W2074163058 title "The piezoelectric effect of GaAs used for resonators and resonant sensors" @default.
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- W2074163058 doi "https://doi.org/10.1088/0960-1317/4/1/004" @default.
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