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- W2074175829 abstract "Nissin’s boron and carbon cluster ion implanter CLARIS G2 has been developed for the mass production of next generation CMOS devices. Development of boron cluster implant technique was presented at last IIT conference in 2008 [1]. In this paper, development of carbon cluster (C16Hx+ and C7Hx+) implant technique is described. Carbon cluster implantation has been well productized in terms of throughput, beam quality and lifetime." @default.
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- W2074175829 date "2011-01-01" @default.
- W2074175829 modified "2023-09-27" @default.
- W2074175829 title "CLARIS G2: Development of Carbon Cluster Implantation" @default.
- W2074175829 doi "https://doi.org/10.1063/1.3548416" @default.
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