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- W2074277579 abstract "Based on a two-dimensional (2D) fluid-plasma model of low-pressure hydrogen discharges sustained by rf power deposition of the type of inductive discharges with a planar coil, the study presents the spatial distribution of the plasma parameters and of the fluxes in the discharge and discussions outlining plasma maintenance in regions outside the rf power input." @default.
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- W2074277579 date "2010-04-01" @default.
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- W2074277579 title "2D model of a hydrogen inductive discharge with a planar coil" @default.
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- W2074277579 doi "https://doi.org/10.1088/1742-6596/223/1/012002" @default.
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